The compression behavior during semi-solid state is a fundamental basis for the following rheoforming or thixoforming. Coexist of solid/liquid phase leads to the unique deformation behavior. The chemical composition at each phase is different from conventional forming process. Deformation behavior and microstructure evolution are determined by various effects such as initial state, heating, cooling, etc. In this work, the semi-solid compression tests of 9Cr18 as hot-rolled material and semi-solid billet were conducted, respectively. Microstructure evolution during heating, semi-solid state, deformation and cooling was investigated by OM and SEM. Solid/liquid flow behavior and the relationship of stress-strain were analyzed. The results showed the preparation of semi-solid billet is essential for the uniformity of solid particle and liquid phase, which would help to demonstrate the flow behavior. Only heating the as hot-rolled material to semi-solid led to the banded precipitation of liquid phase. The banded melting of as hot-rolled material made it hard for liquid phase to connect with each other. Liquid flow only happened in partial area and plastic deformation of solid particles was the main deformation behavior. The stress increased at the final stage. As for semi-solid billet, solid particles and liquid film coexisted uniformly. Macro separation of solid/liquid occurred as deformation came into thixotropic stage. Liquid flew towards outside and solid particles rotated, thus leading to the decrease of stress. Microstructure evolution at semi-solid state was different from conventional heat treatment. Solid austenite particles at semi-solid state could dissolve more alloying elements than normal austenization (1050 ℃). This phenomenon would help to improve the stability of austenite and over-saturated meta-austenite was obtained after cooling. The special microstructure evolution during semi-solid state might provide a possible way to design a new heat treatment procedure.