碳基非晶镀层的纳米晶诱发机理及其摩擦学性能研究

doi:10.11900/0412.1961.2016.00436

金属学报

2017, Vol. 53

Issue (7): 879-887 DOI: 10.11900/0412.1961.2016.00436

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碳基非晶镀层的纳米晶诱发机理及其摩擦学性能研究

董丹,蒋百灵(

),郭萌,杨超

西安理工大学材料科学与工程学院西安 710048

Study on Nano-Crystallization Mechanism and Tribological Performance of Amorphous Carbon-Based Coatings

Dan DONG,Bailing JIANG(

),Meng GUO,Chao YANG

School of Materials Science and Engineering, Xi'an University of Technology, Xi'an 710048, China

引用本文:

董丹,蒋百灵,郭萌,杨超. 碳基非晶镀层的纳米晶诱发机理及其摩擦学性能研究[J]. 金属学报, 2017, 53(7): 879-887.
Dan DONG, Bailing JIANG, Meng GUO, Chao YANG. Study on Nano-Crystallization Mechanism and Tribological Performance of Amorphous Carbon-Based Coatings[J]. Acta Metall Sin, 2017, 53(7): 879-887.

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摘要:

采用磁控溅射离子镀技术制备了一组不同Cr含量的碳基离子镀层,利用XRD、SEM、TEM、XPS及Raman光谱对镀层的微观结构进行了表征,并分析了微观结构对镀层的力学性能及摩擦学性能的影响。实验结果表明：随着Cr含量的增加,碳基镀层从典型的非晶结构转变为纳米晶/非晶复合结构,sp²杂化键含量逐渐增加,sp³杂化键含量逐渐减少,并且碳基镀层的硬度和内应力均随着Cr含量的增加而呈现减小的趋势。微量的金属Cr掺杂可有效地降低镀层的摩擦系数和比磨损率。过量的Cr掺杂虽有利于sp²杂化键含量的提高,但金属相的弥散分布导致了碳基镀层摩擦系数和比磨损率的增大,摩擦学性能变差。

关键词 ：碳基镀层, Cr含量, 微观结构, 摩擦学性能

Abstract：

Amorphous carbon coatings mainly composed of sp³ and sp² bonds have a great potential to be widely used in modern industry for their attractive properties, such as high hardness, high wear resistance and low friction coefficient. However, the high internal stress and poor adhesion of amorphous carbon coatings limit the range of industrial applications. In order to reduce the internal stress and improve the tribological performance, a series of carbon-based coatings with different atomic fraction of Cr were prepared by magnetron sputtering. The microstructure of coatings was characterized by XRD, SEM, TEM, XPS and Raman spectra. The mechanical and tribological properties of coatings were analyzed. The results showed that with the increase of atomic fraction of Cr, the carbon-based coatings changed from amorphous structure to nano-crystalline/amorphous composite structure, the ratio of sp² bond increased and the ratio of sp³ bond decreased gradually. Also, the hardness and the internal stress showed a decreasing trend with the increase of atomic fraction of Cr. In addition, a small amount of Cr doping could effectively reduce the friction coefficient and specific wear rates of coatings. Excessive Cr doping is beneficial to the increase of the ratio of sp² bond, however, the dispersion distribution of the metal phase leads to the increase of the friction coefficient and specific wear rates, so that the tribological properties were deteriorated.

Key words： carbon-based coating Cr content microstructure tribological performance

收稿日期: 2016-10-05

基金资助:国家自然科学基金项目No.51271144

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表1 碳基离子镀层的沉积参数

图1 不同Cr含量镀层的表面形貌

图2 不同Cr含量镀层的Raman光谱

图3 不同Cr含量镀层的ID/IG及G峰位置

图4 不同Cr含量镀层的C1s精细谱

图5 不同Cr含量镀层的C1s精细谱拟合结果

图6 不同Cr含量镀层的XRD谱

图7 不同Cr含量镀层工作层的HRTEM像和SAED谱

图8 不同Cr含量镀层的力学性能

图9 不同Cr含量镀层的摩擦系数

图10 不同Cr含量镀层的比磨损率

图11 不同Cr含量镀层的磨痕形貌

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