Acta Metall Sin  1992, Vol. 28 Issue (8): 67-71    DOI:

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PERFORMANCE AND MICROSTRUCTURE OF SUPERHARD Si_3N_4 FILM BY HIGH POWER CO_2 LASER CVD

FENG Zhongchao; GUO Liang; LIANG Yong; HAN Jian; HOU Wanliang; NING Xiaoguang (Institute of Metal Resarch; Academia Sinica; Shenyang)

FENG Zhongchao; GUO Liang; LIANG Yong; HAN Jian; HOU Wanliang; NING Xiaoguang (Institute of Metal Resarch; Academia Sinica; Shenyang). PERFORMANCE AND MICROSTRUCTURE OF SUPERHARD Si_3N_4 FILM BY HIGH POWER CO_2 LASER CVD. Acta Metall Sin, 1992, 28(8): 67-71.

Abstract References Related Articles Recommended Metrics Download:  PDF(1303KB)  Export:  BibTeX | EndNote (RIS)       Abstract  A superhard α-Si_3N_4 film, deposited on metal substrate, was made by laser chemical vapour deposition adopting a kW-level high power CO_2 laser, Most films are of fine grain Si_3N_4. They join the metal substrate in strong bond. The films have super hardness, excellent resistances to wear and corrosion, etc. Their thickness may be controlled within 5—30μm. Key words:  laser chemical vapour deposition      Si_3N_4 film      microstructure      hardness      wear resistance      corrosion resistance      Received:  18 August 1992      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1992/V28/I8/67 1 冯钟潮.全国激光涂层科学与技术研讨会文集,沈阳,1991:87-95 2 Sugimura A, Fukuda Y, Hanabusa M. J Appl Phys, 1987; 62:3222 3 Pan E T-S, Flint J H, Adler D, Haggerty J S. J Appl Phys, 1987; 61:4535 4 冯钟潮,梁勇,郭良,佟百运,韩健.全国首届激光加工学术讨论会论文集,北京,1989:113-117 5 Feng Zhongchao, Liang Yong, Guo Liang, Tong Baiyun, Han Jian. In: Huang Liji ed., Thin Films and Beam-Solid Interactions, CMRS Int. 1990 Conf, Vol. 4, Beijing, 18-22 June, 1990, Amsterdam: North-Holland. 1991: 459-463Z [1] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264. [2] LU Nannan, GUO Yimo, YANG Shulin, LIANG Jingjing, ZHOU Yizhou, SUN Xiaofeng, LI Jinguo. Formation Mechanisms of Hot Cracks in Laser Additive Repairing Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1243-1252. [3] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189. [4] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108. [5] LIU Xingjun, WEI Zhenbang, LU Yong, HAN Jiajia, SHI Rongpei, WANG Cuiping. Progress on the Diffusion Kinetics of Novel Co-based and Nb-Si-based Superalloys[J]. 金属学报, 2023, 59(8): 969-985. [6] CHEN Liqing, LI Xing, ZHAO Yang, WANG Shuai, FENG Yang. Overview of Research and Development of High-Manganese Damping Steel with Integrated Structure and Function[J]. 金属学报, 2023, 59(8): 1015-1026. [7] LI Jingren, XIE Dongsheng, ZHANG Dongdong, XIE Hongbo, PAN Hucheng, REN Yuping, QIN Gaowu. Microstructure Evolution Mechanism of New Low-Alloyed High-Strength Mg-0.2Ce-0.2Ca Alloy During Extrusion[J]. 金属学报, 2023, 59(8): 1087-1096. [8] SI Yongli, XUE Jintao, WANG Xingfu, LIANG Juhua, SHI Zimu, HAN Fusheng. Effect of Cr Addition on the Corrosion Behavior of Twinning-Induced Plasticity Steel[J]. 金属学报, 2023, 59(7): 905-914. [9] SUN Rongrong, YAO Meiyi, WANG Haoyu, ZHANG Wenhuai, HU Lijuan, QIU Yunlong, LIN Xiaodong, XIE Yaoping, YANG Jian, DONG Jianxin, CHENG Guoguang. High-Temperature Steam Oxidation Behavior of Fe22Cr5Al3Mo-xY Alloy Under Simulated LOCA Condition[J]. 金属学报, 2023, 59(7): 915-925. [10] ZHANG Deyin, HAO Xu, JIA Baorui, WU Haoyang, QIN Mingli, QU Xuanhui. Effects of Y2O3 Content on Properties of Fe-Y2O3 Nanocomposite Powders Synthesized by a Combustion-Based Route[J]. 金属学报, 2023, 59(6): 757-766. [11] WU Dongjiang, LIU Dehua, ZHANG Ziao, ZHANG Yilun, NIU Fangyong, MA Guangyi. Microstructure and Mechanical Properties of 2024 Aluminum Alloy Prepared by Wire Arc Additive Manufacturing[J]. 金属学报, 2023, 59(6): 767-776. [12] WANG Fa, JIANG He, DONG Jianxin. Evolution Behavior of Complex Precipitation Phases in Highly Alloyed GH4151 Superalloy[J]. 金属学报, 2023, 59(6): 787-796. [13] FENG Aihan, CHEN Qiang, WANG Jian, WANG Hao, QU Shoujiang, CHEN Daolun. Thermal Stability of Microstructures in Low-Density Ti2AlNb-Based Alloy Hot Rolled Plate[J]. 金属学报, 2023, 59(6): 777-786. [14] GUO Fu, DU Yihui, JI Xiaoliang, WANG Yishu. Recent Progress on Thermo-Mechanical Reliability of Sn-Based Alloys and Composite Solder for Microelectronic Interconnection[J]. 金属学报, 2023, 59(6): 744-756. [15] LIU Manping, XUE Zhoulei, PENG Zhen, CHEN Yulin, DING Lipeng, JIA Zhihong. Effect of Post-Aging on Microstructure and Mechanical Properties of an Ultrafine-Grained 6061 Aluminum Alloy[J]. 金属学报, 2023, 59(5): 657-667. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed