INFLUENCE OF N2 FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD

doi:10.3724/SP.J.1037.2013.00698

Acta Metall Sin

2014, Vol. 50

Issue (5): 540-546 DOI: 10.3724/SP.J.1037.2013.00698

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INFLUENCE OF N₂ FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD

WANG Zhenyu^1,², XU Sheng³, ZHANG Dong¹, LIU Xincai², KE Peiling¹(

), WANG Aiying¹

1 Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201
2 Faculty of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315211
3 TOPHONEST Co. Ltd, Huzhou 313000

Cite this article:

WANG Zhenyu, XU Sheng, ZHANG Dong, LIU Xincai, KE Peiling, WANG Aiying. INFLUENCE OF N₂ FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD. Acta Metall Sin, 2014, 50(5): 540-546.

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Abstract

Over the past years, TiSiN coatings have gained increasing importance in the field of cutting tool coatings due to its enhanced hardness and superior oxidation resistance properties produced by the nanocomposite microstructure of TiN nanocrystals embedded in an amorphous Si₃N₄ matrix. Many methods have been developed to prepare TiSiN coatings, typically named by the DC magnetron sputtering (DCMS) technique and cathodic arc ion plating (AIP), whereas limited studies have been carried out on the deposition of nanocomposite coatings using the high power impulse magnetron sputtering (HIPIMS) approach. The TiSiN coatings were reactively magnetron sputtered in mixed Ar/N₂ precursor gases in a new HIPIMS system with different flow rate of N₂ in this work. The deposition rate, crystal structure, composition, surface morphology, microstructure and mechanical properties were investigated systematically by surface profilometer, XRD, XPS, SPM, SEM, HRTEM and nano-indentation and the plasma discharge also was studied. The results show that increasing the flow rate of N₂ caused the decrease of deposition rate as expected, accompanying with the change of preferred orientation from (200) orientation to (220) orientation and the decreased compactness, discharge degree and ionization rate. Contrary to the changes of Ti content, Si content gradually increased with increasing the flow rate of N₂, but their changing scale were small. Combined with XRD and XPS analysis, the results indicated that the coatings were composed of crystalline TiN, amorphous Si₃N₄and free Si. Besides, free Si disappeared with further increasing the flow rate of N₂. This nanocomposite structure can ultimately be assessed by HRTEM where individual grains and the amorphous regions can be distinguished. In addition, the grain size increased gradually with increasing the flow rate of N₂. Furthermore, both the hardness and elastic modulus linearly decreased with increasing the flow rate of N₂.

Key words: high power impulse magnetron sputtering TiSiN coating discharge characteristic nanocomposite structure mechanical property

ZTFLH:

TB3

Fund: Supported by National Basic Research Program of China (No.2013CB632302) and Ningbo Science and Technology Innovation Team (No.2011B81001)

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	Zhenyu WANG
	Sheng XU
	Dong ZHANG
	Xincai LIU
	Peiling KE
	Aiying WANG

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https://www.ams.org.cn/EN/10.3724/SP.J.1037.2013.00698 OR https://www.ams.org.cn/EN/Y2014/V50/I5/540

Fig.1

高功率脉冲磁控溅射沉积系统示意图

Fig.2

靶电压和靶电流随N₂流量变化的波形图

Fig.3

TiSiN涂层的沉积速率随N₂流量的变化

Fig.4

不同N₂流量时的SPM形貌图

Fig.5

不同N₂流量下TiSiN涂层的表面粗糙度

Fig.6

不同N₂流量下TiSiN涂层的XRD谱

Fig.7

不同N₂流量下TiSiN涂层的截面形貌

Fig.8

N₂流量为10 mL/min时的N1s, Ti2p和N₂流量为10, 20和30 mL/min的Si2p XPS谱

表1 不同N₂流量下TiSiN涂层的化学成分

Fig.9

N₂流量为10和50 mL/min时TiSiN涂层的HRTEM像

Fig.10

不同N₂流量下TiSiN涂层的硬度和弹性模量

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