离子镀过程中基体“热影响区”的演变及其对镀层的影响

doi:10.11900/0412.1961.2017.00121

金属学报

2018, Vol. 54

Issue (3): 463-469 DOI: 10.11900/0412.1961.2017.00121

本期目录 | 过刊浏览

离子镀过程中基体“热影响区”的演变及其对镀层的影响

郭腾¹, 李洪涛², 蒋百灵^1,²(

), 邢益彬², 张新宇²

1 西安理工大学材料科学与工程学院西安 710048
2 南京工业大学材料科学与工程学院南京 211816

Evolution of Substrate "Heat Affected Zone" in Ion Plating and Its Effect on Coatings

Teng GUO¹, Hongtao LI², Bailing JIANG^1,²(

), Yibin XING², Xinyu ZHANG²

1 School of Materials Science and Engineering, Xi′an University of Technology, Xi'an 710048, China;
2 School of Materials Science and Engineering, Nanjing Tech University, Nanjing 211816, China

引用本文:

郭腾, 李洪涛, 蒋百灵, 邢益彬, 张新宇. 离子镀过程中基体“热影响区”的演变及其对镀层的影响[J]. 金属学报, 2018, 54(3): 463-469.
Teng GUO, Hongtao LI, Bailing JIANG, Yibin XING, Xinyu ZHANG. Evolution of Substrate "Heat Affected Zone" in Ion Plating and Its Effect on Coatings[J]. Acta Metall Sin, 2018, 54(3): 463-469.

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摘要:

以淬火态40CrNiMoA为基材,研究了靶功率密度对“热影响区”升温幅度、区域尺度及镀层结构的影响规律。结果表明,随着靶功率密度从20.61 W/cm²提高到143.01 W/cm²,不仅与镀层比邻的基体温度从310 ℃升高到525 ℃、“热影响区”的尺度从0.37 mm增加到2.51 mm,而且纯Ti镀层的择优取向由(002)转变为(110),平均晶粒尺寸由9.9 nm增大至19.5 nm,表面粗糙度先减小后增大。同时,当基体温度大于300 ℃时,镀层的内应力随着晶格微观缺陷的消除而释放。

关键词 ：离子镀技术, 热影响区, Ti镀层, 组织结构, 内应力

Abstract：

In the process of depositing coatings on the surface of metal substrates via ion plating, substrate temperature increases due to the bombardment of deposited particles and the heat radiation of discharge target, forming "heat affected zone" where substrate temperature gradually reduces from the surface. In this work, quenched 40CrNiMoA was prepared as substrate to discuss about the influence of target power density on the temperature rising range, region scale of "heat affected zone" and microstructure of Ti coating. The results show that the traditional metal heat treatment method can accurately characterize temperature rising range and region scale of "heat affected zone". And, with target power density increases from 20.61 W/cm²to 143.01 W/cm², substrate temperature ranges from 310 ℃ to 525 ℃, the region scale of "heat affected zone" reaches to 2.51 mm. Also, the preferential orientation of Ti coating changes from (002) to (110), the average grain size significantly increases from 9.9 nm to 19.5 nm, the surface roughness declines first and then increases slightly. In addition, the internal stress releases gradually for elimination of lattice defects when substrate temperature is above 300 ℃.

Key words： ion plating heat affected zone Ti coating microstructure internal stress

收稿日期: 2017-04-07

基金资助:资助项目国家自然科学基金项目No.51401106

作者简介:

作者简介郭腾,女,1990年生,硕士生

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https://www.ams.org.cn/CN/10.11900/0412.1961.2017.00121 或 https://www.ams.org.cn/CN/Y2018/V54/I3/463

图1 淬火态40CrNiMoA显微硬度随回火温度的变化

图2 不同靶功率密度下镀层与基体界面下方沿纵深方向的显微硬度分布

图3 不同靶功率密度下比邻镀层的基体组织形貌

图4 不同靶功率密度下镀层与基体界面下方沿纵深方向的温度分布

表1 不同靶功率密度下比邻镀层的基体温度和镀层内应力

表2 不同靶功率密度下纯金属Ti镀层的织构系数和平均晶粒尺寸

图5 不同靶功率密度下纯金属Ti镀层的XRD谱

图6 不同靶功率密度下纯金属Ti镀层的表面形貌

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