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N2流量对HIPIMS制备TiSiN涂层结构和力学性能的影响* |
王振玉1,2, 徐胜3, 张栋1, 刘新才2, 柯培玲1(), 汪爱英1 |
1 中国科学院宁波材料技术与工程研究所海洋新材料与应用技术重点实验室, 宁波 315201 2 宁波大学材料科学与化学工程学院, 宁波 315211 3 高鸿集团有限公司, 湖州 313000 |
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INFLUENCE OF N2 FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD |
WANG Zhenyu1,2, XU Sheng3, ZHANG Dong1, LIU Xincai2, KE Peiling1(), WANG Aiying1 |
1 Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201 2 Faculty of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315211 3 TOPHONEST Co. Ltd, Huzhou 313000 |
引用本文:
王振玉, 徐胜, 张栋, 刘新才, 柯培玲, 汪爱英. N2流量对HIPIMS制备TiSiN涂层结构和力学性能的影响*[J]. 金属学报, 2014, 50(5): 540-546.
Zhenyu WANG,
Sheng XU,
Dong ZHANG,
Xincai LIU,
Peiling KE,
Aiying WANG.
INFLUENCE OF N2 FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD[J]. Acta Metall Sin, 2014, 50(5): 540-546.
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