金属学报  2012, Vol. 48 Issue (9): 1132-1138    DOI: 10.3724/SP.J.1037.2011.00751

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Mo含量对TiMoN薄膜微观组织和摩擦磨损性能的影响

许俊华, 鞠洪博, 喻利花

江苏科技大学先进焊接技术江苏省重点实验室, 镇江 212003

EFFECTS OF Mo CONTENT ON THE MICROSTRUCTURE AND FRICTION AND WEAR PROPERTIES OF TiMoN FILMS

XU Junhua, JU Hongbo, YU Lihua

Key Laboratory of Advanced Welding Technology of Jiangsu Province, Jiangsu University of Science and Technology, Zhenjiang 212003

许俊华 鞠洪博 喻利花. Mo含量对TiMoN薄膜微观组织和摩擦磨损性能的影响[J]. 金属学报, 2012, 48(9): 1132-1138.
, , . EFFECTS OF Mo CONTENT ON THE MICROSTRUCTURE AND FRICTION AND WEAR PROPERTIES OF TiMoN FILMS[J]. Acta Metall Sin, 2012, 48(9): 1132-1138.

摘要 参考文献 相关文章 Metrics 全文: PDF(3811 KB)   摘要: 采用射频磁控溅射制备不同Mo含量的TiMoN薄膜. 利用XRD, SEM, EDS, 纳米压痕仪和高温摩擦磨损实验对薄膜的相结构, 形貌, 成分, 力学性能和摩擦磨损性能进行分析. 结果表明, TiMoN薄膜为fcc结构; 当Mo占金属元素总量的比例X<68.37%(原子分数)时, 薄膜主要为Mo在TiN中的置换固溶体; 当X>68.37%时, 薄膜主要为Ti在Mo2N中的置换固溶体; 随Mo含量的增高, 择优取向发生改变, 晶粒尺寸逐渐减小, 薄膜的显微硬度显著升高, 最高达36.37 GPa, 摩擦系数逐渐降低, 并在X达到68.37%后稳定在0.4左右; 不同Mo含量的TiMoN薄膜的磨损率在10-8-10-6 mm2/N之间, 优于TiN薄膜. 基于晶体化学理论,对TiMoN薄膜低摩擦系数的原因进行了讨论. 关键词 ： 射频磁控溅射,  TiMoN薄膜,  微观组织,  摩擦磨损     Abstract：Over the past years, hard wear resistant TiN coatings deposited by magnetron sputtering have gained increasing importance in the field of decorative and cutting tool coatings. With the ongoing trend to multifunctional operating cutting tools, new solutions in the design of tools are demanded. The alloying of TiN coatings with additional elements, for instance, can effectively enhance hardness, wear resistance and so on. Both TiAlN and TiSiN coatings, well-studied nitride systems, yield superior oxidation resistance, and extend the life of cutting tools by significant margins in comparison with TiN coatings. Numerous research activities focus on TiAlN, TiSiN systems, whereas limited efforts have been made to characterize TiMoN coatings. Low coefficient of friction is a common property in various Mo-containing coatings that can react with oxygen in the air into Magneli phase (MoO3). The effects of Mo alloying on mechanical properties and wear resistance of TiN-based coatings remain to be investigated. TiMoN composite films with various Mo concentrations were deposited using RF reactive magnetron sputtering and characterized by SEM, EDS, XRD, nano-indentation and wearing tester. The results show that TiMoN coatings have fcc structure. When atomic fraction of Mo in total metallic elements (X) is less than 68.37\%, a TiMoN solid solution was formed by dissolution of Mo into the TiN lattice; when X is more than 68.37\%, a TiMoN solid solution was formed by dissolution of Ti into the Mo2N lattice. With Mo contents increase, preferential orientation change, microhardness increase significantly, the coefficient friction and grain size decrease, friction and wear of TiMoN coatings are excellent. Low coefficient friction can be primarily attributed to the formation of lubricious MoO3 on the wear track surface in dry sliding wear conditions. The principles of a crystal chemical model relating the lubricity of complex oxides to their ionic potentials can explain this mechanism. Key words： RF reactive magnetron sputtering    TiMoN coatings    microstructure    friction and wear 收稿日期: 2011-12-03      基金资助: 国家自然科学基金项目51074080和江苏省自然科学基金项目BK2008240 资助 作者简介: 许俊华, 男, 1962年生, 教授, 博士 服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 许俊华 喻利花 鞠洪博 44.8K 链接本文: https://www.ams.org.cn/CN/10.3724/SP.J.1037.2011.00751      或      https://www.ams.org.cn/CN/Y2012/V48/I9/1132 [1] Yu L H, Dong S R, Xu J H, Li G Y. Acta Phys Sin, 2008; 57: 3607 (喻利花, 董师润, 许俊华, 李戈杨. 物理学报, 2008; 57: 3607) [2] Hu S B, Cui K. Mater Prot, 2001; 34: 24 [3] Yu L H, Dong S T, Dong S R, Xu J H. Acta Phys Sin, 2008; 57: 5151 (喻利花, 董松涛, 董师润, 许俊华. 物理学报, 2008; 57: 5151) [4] Hiroyuki H, Koji S, Akihiro M, Kiyotaka K, Hideaki M. J Refrac Mater Hard Mater, 2012 [5] Masatoshi N, Yosuke G, Osamu U, Shinzo O. Catalysis Today, 1998; 43: 249 [6] Ozturk A, Ezirmik K V, Kazmanl? K, Urgen M, Ery?lmaz O L, Erdemir A. Trib Int, 2008; 41: 49 [7] Sarioglu C, Demirler U, Kazmanli M K, Urgen M. 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