Please wait a minute...
Acta Metall Sin  2009, Vol. 45 Issue (5): 610-614    DOI:
论文 Current Issue | Archive | Adv Search |
COMPOSITION, MICROSTRUCTURE AND PROPERTIES OF C–N–Cr FILMS DEPOSITED BY PULSED BIAS ARC ION PLATING
LI Hongkai 1; LIU Qi 1; LIN Guoqiang 2; DONG Chuang 1
1. School of materials science and engineering; Dalian University of Technology; Dalian 116085
2. School of physics and optoelectronic engineering; Dalian University of Technology; Dalian 116085
Cite this article: 

LI Hongkai LIU Qi LIN Guoqiang DONG Chuang . COMPOSITION, MICROSTRUCTURE AND PROPERTIES OF C–N–Cr FILMS DEPOSITED BY PULSED BIAS ARC ION PLATING. Acta Metall Sin, 2009, 45(5): 610-614.

Download:  PDF(756KB) 
Export:  BibTeX | EndNote (RIS)      
Abstract  

Diamond–like carbon (DLC), which used to describe a wide range of amorphous carbon films containing sp3 bond, has been extensively studied and applied in the fields of mechanics, electronics, optics and medicine, due to their excellent properties, such as high hardness and wear resistance, low friction coefficient, high chemical inertness, low expansion coefficient, well biocompatibility, and so on. However, high internal stress and low thermal stability are the main problems in applications of DLC. On the one hand, high internal stress is generated in the growth process of DLC, which greatly reduces the adhesion strength of the film to substrate, making the film easily delaminate from the substrate. On the other hand, the DLC will graphitize and be obviously oxidized when the temperature is over 350 ℃, leading to the deterioration of properties evidently. Non–metal N has strong affinity with transition metal Cr and their compound CrN has high hardness and oxidation resistance. So it is expected that composite film with hard CrN crystalline phase imbedded within DLC amorphous matrix maybe obtained by doping N and Cr simultaneously. In this paper, the uniform, smooth and dense C–N–Cr films with different compositions were deposited on cemented carbide substrate at different nitrogen flow rates by pulsed bias arc ion plating. The surface morphology, composition, structure and properties of C–N–Cr films were investigated by SEM, GIXRD, XPS, Raman spectra and Nano–indentation, respectively. The results show that the nitrogen content in the C–N–Cr films increases linearly and then slowly with nitrogen flow rate increasing, while the Cr content first keeps stable and then decreases linearly. The C–N–Cr films have high hardness (>30 GPa) and elastic modulus (>500 GPa) when the nitrogen flow rate is not more than 20 mL/min, above which the hardness and elastic modulus decrease drastically and only have the value of 13.6 and 190.8 GPa when the nitrogen flow rate is 100 mL/min.

Key words:  C-N-Cr films      pulsed bias      arc ion plating      microstructure      property     
Received:  22 October 2008     
ZTFLH: 

TB43

 
Fund: 

Supported by National High Technical Research and Development Program of China (Nos.2006AA03Z521 and 2007AA03Z221)

URL: 

https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2009/V45/I5/610

[1] Wang E G. Prog Mater Sci, 1997; 41: 241
[2] Widlow I, Chung Y W. Int Mater Rev, 2002; 47: 153
[3] Stephen M, Juan M M. Diamond Relat Mater, 1999; 8:1809
[4] Martin P J, Bendavid A. Thin Solid Films, 2001; 394: 1
[5] Lin G Q, Zhao Y H, Guo H M, Wang D Z, Dong C, Huang R F, Wen L S. J Vac Sci Technol, 2004; 22: 1218
[6] Musil J. Surf Coat Technol, 2000; 125: 322
[7] Li H K, Lin G Q, Dong C, Wen L S. Acta Metall Sin, 2008; 44: 917
(李红凯, 林国强, 董闯, 闻立时. 金属学报, 2008; 44: 917)

[1] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189.
[2] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108.
[3] ZHANG Jian, WANG Li, XIE Guang, WANG Dong, SHEN Jian, LU Yuzhang, HUANG Yaqi, LI Yawei. Recent Progress in Research and Development of Nickel-Based Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1109-1124.
[4] ZHENG Liang, ZHANG Qiang, LI Zhou, ZHANG Guoqing. Effects of Oxygen Increasing/Decreasing Processes on Surface Characteristics of Superalloy Powders and Properties of Their Bulk Alloy Counterparts: Powders Storage and Degassing[J]. 金属学报, 2023, 59(9): 1265-1278.
[5] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264.
[6] LU Nannan, GUO Yimo, YANG Shulin, LIANG Jingjing, ZHOU Yizhou, SUN Xiaofeng, LI Jinguo. Formation Mechanisms of Hot Cracks in Laser Additive Repairing Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1243-1252.
[7] CHEN Liqing, LI Xing, ZHAO Yang, WANG Shuai, FENG Yang. Overview of Research and Development of High-Manganese Damping Steel with Integrated Structure and Function[J]. 金属学报, 2023, 59(8): 1015-1026.
[8] LI Jingren, XIE Dongsheng, ZHANG Dongdong, XIE Hongbo, PAN Hucheng, REN Yuping, QIN Gaowu. Microstructure Evolution Mechanism of New Low-Alloyed High-Strength Mg-0.2Ce-0.2Ca Alloy During Extrusion[J]. 金属学报, 2023, 59(8): 1087-1096.
[9] LIU Xingjun, WEI Zhenbang, LU Yong, HAN Jiajia, SHI Rongpei, WANG Cuiping. Progress on the Diffusion Kinetics of Novel Co-based and Nb-Si-based Superalloys[J]. 金属学报, 2023, 59(8): 969-985.
[10] DING Hua, ZHANG Yu, CAI Minghui, TANG Zhengyou. Research Progress and Prospects of Austenite-Based Fe-Mn-Al-C Lightweight Steels[J]. 金属学报, 2023, 59(8): 1027-1041.
[11] YUAN Jianghuai, WANG Zhenyu, MA Guanshui, ZHOU Guangxue, CHENG Xiaoying, WANG Aiying. Effect of Phase-Structure Evolution on Mechanical Properties of Cr2AlC Coating[J]. 金属学报, 2023, 59(7): 961-968.
[12] SUN Rongrong, YAO Meiyi, WANG Haoyu, ZHANG Wenhuai, HU Lijuan, QIU Yunlong, LIN Xiaodong, XIE Yaoping, YANG Jian, DONG Jianxin, CHENG Guoguang. High-Temperature Steam Oxidation Behavior of Fe22Cr5Al3Mo-xY Alloy Under Simulated LOCA Condition[J]. 金属学报, 2023, 59(7): 915-925.
[13] ZHANG Deyin, HAO Xu, JIA Baorui, WU Haoyang, QIN Mingli, QU Xuanhui. Effects of Y2O3 Content on Properties of Fe-Y2O3 Nanocomposite Powders Synthesized by a Combustion-Based Route[J]. 金属学报, 2023, 59(6): 757-766.
[14] WU Dongjiang, LIU Dehua, ZHANG Ziao, ZHANG Yilun, NIU Fangyong, MA Guangyi. Microstructure and Mechanical Properties of 2024 Aluminum Alloy Prepared by Wire Arc Additive Manufacturing[J]. 金属学报, 2023, 59(6): 767-776.
[15] GUO Fu, DU Yihui, JI Xiaoliang, WANG Yishu. Recent Progress on Thermo-Mechanical Reliability of Sn-Based Alloys and Composite Solder for Microelectronic Interconnection[J]. 金属学报, 2023, 59(6): 744-756.
No Suggested Reading articles found!