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| THE CHARACTERISTICS AND ANALYSIS OF THE SHEATH SCALING EVOLUTION IN PULSED BIAS ARC ION PLATING |
| Dong Qi;;; |
| 大连理工大学 电气工程系 |
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Cite this article:
Dong Qi. THE CHARACTERISTICS AND ANALYSIS OF THE SHEATH SCALING EVOLUTION IN PULSED BIAS ARC ION PLATING. Acta Metall Sin, 2006, 42(8): 861-864 .
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Abstract Based on a one-dimensional planar sheath model, the kinetic model of pulsed bias arc ion plating (PBAIP) sheath according to temporal evolvement and its analytic expression are presented. Combining the measuring results of plasma parameters in PBAIP process, temporal evolvement disciplinarian of the thickness of PBAIP sheath and ion current density in the sheath, and the effect of pulsed bias magnitude on sheath thickness and ion current are simulated and analyzed. The results indicate that both the thickness of stable-state sheath and the time of sheath formation are far less than the values reported by PSII. The expanding of the PBAIP sheath almost follows the real-time change of pulsed bias voltage, and the sheath thickness under pulsed bias voltage nearly equals to that under DC bias voltage. The results are helpful for making the most of advantages of PBAIP and improvement of its process control.
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Received: 07 November 2005
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[1]Olbrich W,Fessmann J,Kampschulte G,Ebberink J.Surf Coat Technol,1991;49:258
[2]Wen L S,Huang R F.Vacuum,2000;37(1):1(闻立时，黄荣芳．真空，2000；37(1)：1)
[3]Perry A J,Tian A F,Treglio J R,Loomis C.Surf Coat Technol,1994;68/69:528
[4]Li Z Y,Zhu W B,Zhang Y,Li G Y,Cao E Y.Surf Coat Technol,2000;131:158
[5]Li M S,Wang F H.Surf Coat Technol,2003;167:197
[6]Lin G Q,Ding Z F,Qi D,Wang N H,Huang M D,Wang D Z,Wang Y N,Dong C,Wen L S.Acta Metall Sin (Engl Lett),2002;15:91
[7]Huang M D.PhD Thesis.Dalian University of Technology,2002 (黄美东．大连理工大学博士学位论文，2002)
[8]Kim Y W,Kim G H,Han S,Lee Y,Cho J,Rhee S Y.Surf Coat Technol,2001;136:97
[9]Briehl B,Urbassek H M.Surf Coat Technol,2002;156:131
[10]Gong Y,Wang X G,Duan P,Yu J,Wang D Z.Phys Plasmas,2005;12:043501
[11]Amin A,Aossey D,Nguyen B T.Phys Fluids,1993;5B:3813
[12]Dai Z L,Wang Y N,Ma T C.Acta Phys Sin,2001;50:2398)(戴忠玲，王友年，马腾才．物理学报，2001；50：2398) |
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