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脉冲高能量密度等离子体表面改性AlN膜的形成和结构 |
吴杏芳 韦鲲 单小鸥 杨思泽 |
北京科技大学材料物理系;北京100083 |
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引用本文:
吴杏芳; 韦鲲; 单小鸥; 杨思泽 . 脉冲高能量密度等离子体表面改性AlN膜的形成和结构[J]. 金属学报, 2002, 38(6): 652-656 .
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