Acta Metall Sin  2005, Vol. 41 Issue (9): 985-988     DOI:

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PREPARATION AND MICROSTRUCTURE CHARACTERISTICS OF SUPER-HARD NANOCOMPOSITE Ti-Si-C-N COATING DEPOSITED BY PULSED DC PCVD

GUOYan; CHANG Gengrong; MA Shengli; XU Kewei

State Key Laboratory for Mechanical Behaviors of Materials; Xi'an Jiaotong University; Xi'an 710049

GUOYan; CHANG Gengrong; MA Shengli; XU Kewei. PREPARATION AND MICROSTRUCTURE CHARACTERISTICS OF SUPER-HARD NANOCOMPOSITE Ti-Si-C-N COATING DEPOSITED BY PULSED DC PCVD. Acta Metall Sin, 2005, 41(9): 985-988 .

Abstract References Related Articles Recommended Metrics Download:  PDF(263KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Using an industrial pulsed DC plasma chemical vapor deposition set-up, Ti-Si-C-N coatings were deposited on substrate of high speed steel. The effect of SiCl4 flow rate on chemical composition, microstructure and phases in Ti-Si-C-N coatings was explored by means of XRD, XPS, TEM and SEM. It is suggested that Ti-Si-C-N coatings are of nanocomposite structure composed of nc-Ti(C, N)/a-C/a-Si3N4. The crystalline sizes are in the range of 2-25 nm. When nitrogen content in the coatings was very low, Ti(C, N) changed to TiC and the surface morphologies of Ti-Si-C-N coatings changed from granular grains to strip-shaped grains. Key words:  Ti-Si-C-N      PCVD      nanocomposite coating      microstructure       Received:  31 January 2005      ZTFLH:  TG174.44   Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors GUOYan CHANG Gengrong MA Shengli XU Kewei URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2005/V41/I9/985 [1] Ma D Y,Ma S L, Xu K W. Surf Coat Technol, 2004; 184:182 [2] Ma D Y, Ma S L, Xu K W.Acta Metall Sin,2004;40: 1037 (马大衍,马胜利,徐可为．金属学报, 2004;40:1037) [3] Ma D Y, Ma S L , Xu K W. Acta Metall Sin,2003;39: 1047 (马大衍,马胜利,徐可为．金属学报, 2003;39:1047) [4] Heim D, Holler F, Mitterer C. Surf Coat Technol,1999; 116: 530 [5] Veprek S. Thin Solid Films,1995;268:64 [6] Ma D Y, Ma S L, Xu K W. Tribology, 2003; 215: 476 (马大衍,马胜利,徐可为．摩擦学报,2003;23:476) [7] Ma S L, Ma D Y, Xu K W. Tribology, 2003; 23: 179 (马胜利,马大衍,徐可为．摩擦学报, 2003;23:179) [8] Veprek S. Vaccum, 2002;67:443 [9] Ma S L, Xu K W. Acta Metall Sin, 2004;40:669 (马胜利,徐可为．金属学报,2004;40:669) [10] Ma S L, Xu K W, Jie W. J Vac Sci Technol, 2004; 22B: 1694 [11] Karvankova P. Doctor Degree Thesis,Technical Univer sity Munich, Germany, 2003 [12] Niu X P. Master Degree Thesis, Xi'an Jiaotong University, 2004 (牛新平．西安交通大学硕士学位论文, 2004) [1] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108. [2] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189. [3] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264. 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