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Acta Metall Sin  1998, Vol. 34 Issue (6): 655-660    DOI:
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STRUCTURE AND MICROTRIBOLOGICAL BEHAVIOR OF TEFLON/ Si_3N_4 MICRO-ASSEMBLING FILM
WANC Jihui; WANG Liduo; LU Xinchun; WEN Shizhu; LI Hengde( State Key Laboratory of Tribology; Tsinghua University; Beijing 100084)( Department of Chemistry; Hong Kong University of Science and Technology; Hong Kong)Coerespondent: LU Xinchun; associate professor Tel: (010)62783160-806; Fax. (010)62784691;E-mail: xcluntl pim tsinghua edu cn
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WANC Jihui; WANG Liduo; LU Xinchun; WEN Shizhu; LI Hengde( State Key Laboratory of Tribology; Tsinghua University; Beijing 100084)( Department of Chemistry; Hong Kong University of Science and Technology; Hong Kong)Coerespondent: LU Xinchun; associate professor Tel: (010)62783160-806; Fax. (010)62784691;E-mail: xcluntl pim tsinghua edu cn. STRUCTURE AND MICROTRIBOLOGICAL BEHAVIOR OF TEFLON/ Si_3N_4 MICRO-ASSEMBLING FILM. Acta Metall Sin, 1998, 34(6): 655-660.

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Abstract  Micro-assembling Teflon/Si3N4 multi--farer film was synthesized by ion beam alternating sputtering Teflon and Si3N4 ceramic targets. The structure, mechanical and ndcrotribological properties were studied by PHI--5300, FT--IR2000, Xos and atolinc force and frictioll force microscOPe. The results show that the multilayer is consist of crystalline Teflon and amorphous St3N4. The hardness of the multilayer is less than that of St3N4; but the toughness of Teflon/SisN' is greatly approved. This Teflon/Si3N4 multilayer has low friction coefficient and high wear resistance. The friction force of Tellon/ St3N4 film is linear with the load in nano--scale.The worn track will be formed in Teflon film when the load is greater than 70 uN.Keywrods: Teflon, multilayer film, structure, structure ,microtribology
Key words:  Teflon      multilayer film      structure      structure       microtribology     
Received:  18 June 1998     
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