Acta Metall Sin  1992, Vol. 28 Issue (3): 87-91    DOI:

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PREPARATION OF TiN FILMS BY N_2 ASSISTED Xe~+ ION BEAM ENHANCED DEPOSITION AND THEIR MECHANICAL PROPERTIES

WANG Xi;YANG Genqing;LIU Xianghuai;ZHENG Zhihong;HUANG Wei;ZHOU Zuyao;ZOU Shichang Ion Beam Laboratory; Shanghai Institute of Metallurgy; Academia Sinica

WANG Xi;YANG Genqing;LIU Xianghuai;ZHENG Zhihong;HUANG Wei;ZHOU Zuyao;ZOU Shichang Ion Beam Laboratory; Shanghai Institute of Metallurgy; Academia Sinica. PREPARATION OF TiN FILMS BY N_2 ASSISTED Xe~+ ION BEAM ENHANCED DEPOSITION AND THEIR MECHANICAL PROPERTIES. Acta Metall Sin, 1992, 28(3): 87-91.

Abstract References Related Articles Recommended Metrics Download:  PDF(720KB)  Export:  BibTeX | EndNote (RIS)       Abstract  A new method for preparation of hard TiN films has been developed by electronbeam evaporation--deposition of Ti and bombardment with tens keV Xe~+ ion beam in a N_2 gasenvironment. The TiN film, prepared by Xe~+ ion beam enhanced deposition, is superior to PVDand CVD ones in respects of improved adhension to substrate and low preparing temperature.It exhibited good wear resistance and high Knoop hardness up to 2200 kg / mm~2. Some indus-trial applications have been reported. Key words:  TiN film      ion beam enhanced deposition      property      Received:  18 March 1992      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1992/V28/I3/87 1 Kant R A, Sartwell B D. Mater Sci Eng, 1987; 90: 357 2 Sato T, Ohata K, Asahi N, Ono Y, Oka Y, Hashimoto I, Arimatsu K. Nucl Instrum Methods Phys Res, 1987; B19/20: 644 3 Ito H, Yoshida Y, Yamaji S, Maeyama Y, Ina T, Minowa Y. Nucl Instrum Methods Phys Res, 1989; B39: 174 4 Wang Xi, Liu Xianghuai, Chen Youshan, Yang Genqing, Zhou Zuyao, Zheng Zhihong, Huang Wei, Zou Shichang. Thin Solid Felms, 1991; 202: 315 5 Takano I, Isobe S. Thin Solid Films, 1989; 171: 263 6 Wang Xi, Liu Xianghuai, Chen Youshan, Yang Genqing, Zhou Zuyao, Zheng Zhihong, Huang Wei, Zou Shichang. Nucl Instrum Methods Phys Res, 1991; B59/60: 2725 [1] ZHENG Liang, ZHANG Qiang, LI Zhou, ZHANG Guoqing. Effects of Oxygen Increasing/Decreasing Processes on Surface Characteristics of Superalloy Powders and Properties of Their Bulk Alloy Counterparts: Powders Storage and Degassing[J]. 金属学报, 2023, 59(9): 1265-1278. [2] ZHANG Jian, WANG Li, XIE Guang, WANG Dong, SHEN Jian, LU Yuzhang, HUANG Yaqi, LI Yawei. Recent Progress in Research and Development of Nickel-Based Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1109-1124. [3] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189. [4] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264. [5] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108. [6] DING Hua, ZHANG Yu, CAI Minghui, TANG Zhengyou. Research Progress and Prospects of Austenite-Based Fe-Mn-Al-C Lightweight Steels[J]. 金属学报, 2023, 59(8): 1027-1041. [7] CHEN Liqing, LI Xing, ZHAO Yang, WANG Shuai, FENG Yang. Overview of Research and Development of High-Manganese Damping Steel with Integrated Structure and Function[J]. 金属学报, 2023, 59(8): 1015-1026. [8] LI Jingren, XIE Dongsheng, ZHANG Dongdong, XIE Hongbo, PAN Hucheng, REN Yuping, QIN Gaowu. Microstructure Evolution Mechanism of New Low-Alloyed High-Strength Mg-0.2Ce-0.2Ca Alloy During Extrusion[J]. 金属学报, 2023, 59(8): 1087-1096. [9] YUAN Jianghuai, WANG Zhenyu, MA Guanshui, ZHOU Guangxue, CHENG Xiaoying, WANG Aiying. Effect of Phase-Structure Evolution on Mechanical Properties of Cr2AlC Coating[J]. 金属学报, 2023, 59(7): 961-968. [10] WU Dongjiang, LIU Dehua, ZHANG Ziao, ZHANG Yilun, NIU Fangyong, MA Guangyi. Microstructure and Mechanical Properties of 2024 Aluminum Alloy Prepared by Wire Arc Additive Manufacturing[J]. 金属学报, 2023, 59(6): 767-776. [11] GUO Fu, DU Yihui, JI Xiaoliang, WANG Yishu. Recent Progress on Thermo-Mechanical Reliability of Sn-Based Alloys and Composite Solder for Microelectronic Interconnection[J]. 金属学报, 2023, 59(6): 744-756. [12] LIANG Kai, YAO Zhihao, XIE Xishan, YAO Kaijun, DONG Jianxin. Correlation Between Microstructure and Properties of New Heat-Resistant Alloy SP2215[J]. 金属学报, 2023, 59(6): 797-811. [13] ZHANG Deyin, HAO Xu, JIA Baorui, WU Haoyang, QIN Mingli, QU Xuanhui. Effects of Y2O3 Content on Properties of Fe-Y2O3 Nanocomposite Powders Synthesized by a Combustion-Based Route[J]. 金属学报, 2023, 59(6): 757-766. [14] LIU Junpeng, CHEN Hao, ZHANG Chi, YANG Zhigang, ZHANG Yong, DAI Lanhong. Progress of Cryogenic Deformation and Strengthening-Toughening Mechanisms of High-Entropy Alloys[J]. 金属学报, 2023, 59(6): 727-743. [15] ZHANG Dongyang, ZHANG Jun, LI Shujun, REN Dechun, MA Yingjie, YANG Rui. Effect of Heat Treatment on Mechanical Properties of Porous Ti55531 Alloy Prepared by Selective Laser Melting[J]. 金属学报, 2023, 59(5): 647-656. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed