Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)形状记忆合金薄膜的马氏体相变与阻尼行为

doi:10.11900/0412.1961.2020.00155

金属学报

2020, Vol. 56

Issue (12): 1690-1696 DOI: 10.11900/0412.1961.2020.00155

本期目录 | 过刊浏览

Ti₇₀_-_xTa₁₅Zr₁₅Fe_x (x=0.3、0.6、1.0)形状记忆合金薄膜的马氏体相变与阻尼行为

郑晓航¹, 宁睿¹, 段佳彤², 蔡伟¹(

)

1 哈尔滨工业大学材料科学与工程学院哈尔滨 150006
2 中国工程物理研究院科技信息中心绵阳 621900

Martensitic Transformation and Damping Behavior of Ti₇₀_-_xTa₁₅Zr₁₅Fe_x (x=0.3, 0.6, 1.0) Shape Memory Thin Films

ZHENG Xiaohang¹, NING Rui¹, DUAN Jiatong², CAI Wei¹(

)

1 Institue of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150006, China
2 Center of Science and Technology, China Academy of Engineering Physics, Mianyang 621900, China

引用本文:

郑晓航, 宁睿, 段佳彤, 蔡伟. Ti₇₀_-_xTa₁₅Zr₁₅Fe_x (x=0.3、0.6、1.0)形状记忆合金薄膜的马氏体相变与阻尼行为[J]. 金属学报, 2020, 56(12): 1690-1696.
Xiaohang ZHENG, Rui NING, Jiatong DUAN, Wei CAI. Martensitic Transformation and Damping Behavior of Ti₇₀_-_xTa₁₅Zr₁₅Fe_x (x=0.3, 0.6, 1.0) Shape Memory Thin Films[J]. Acta Metall Sin, 2020, 56(12): 1690-1696.

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摘要:

采用磁控溅射制备Ti_70-_xTa₁₅Zr₁₅Fe_x (x=0.3、0.6、1.0，原子分数，%)合金薄膜，通过XRD、TEM、弯曲法和动态热机械分析研究Fe元素含量对合金薄膜组织结构、马氏体相变、力学性能和阻尼特性的影响。结果表明，Ti_70-_xTa₁₅Zr₁₅Fe_x (x=0.3、0.6、1.0)合金薄膜在室温下为母相与马氏体相共存，逆马氏体相变开始温度高于100 ℃，具有双程记忆效应。添加Fe元素可以提高薄膜的塑性和强度，延伸率可达到12.8% (x=1.0)。薄膜在升温降温过程中均可观察到较高的弛豫型内耗峰，当Fe含量为1.0%时，弛豫内耗峰最大值可达到0.116。

关键词 ：形状记忆合金薄膜, 马氏体相变, 阻尼特性

Abstract：

In recent years, there has been a rapid development in microelectromechanical systems owing to their lightweight and integration with small volume. The microactuater bears low-frequency vibrations during operations, which affects the safety and stability of the device. Ti-Ta-Zr-Fe thin film is a high-temperature shape memory alloy film, which has good shape memory effect and thermal stability. The addition of Fe can improve the plasticity of the film and make it promising to use in high-temperature miniature damping devices. Ti_70-_xTa₁₅Zr₁₅Fe_x (x=0.3, 0.6, and 1.0, atomic fraction, %) shape memory thin films were prepared by direct-current magnetron sputtering. The effect of the Fe content on the microstructures, martensitic transformation, mechanical properties, and damping behavior was studied by XRD, TEM, bending test, and dynamic mechanical analysis. It was found that the room-temperature phase composition of the alloy films with different Fe contents were in the parent and martensite phases. The reverse martensitic transformation temperature of the thin films was above 100 ℃, and the films exhibited the two-way shape memory effect. The addition of Fe enhanced the ductility and strength of the film. When the Fe content was 1.0%, the elongation could reach up to 12.8%. During the heating and cooling processes, the relaxation type friction peak was observed. The damping capacity during the relaxation processof the film containing 1.0%Fe could reach up to 0.116.

Key words： shape memory thin film martensiic transformation damping property

收稿日期: 2020-05-11

ZTFLH:

TG139

基金资助:国家自然科学基金项目(51971083);国家自然科学基金项目(51731005)

作者简介: 郑晓航，女，1983年生，副教授，博士

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https://www.ams.org.cn/CN/10.11900/0412.1961.2020.00155 或 https://www.ams.org.cn/CN/Y2020/V56/I12/1690

表1 Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)薄膜的实际成分 (atomic fraction / %)

图1 Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)薄膜室温下的XRD谱

图2 Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)合金薄膜的TEM明场像及相应的SAED花样

图3 Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)合金薄膜的粒径分布图

图4 弯曲法测量的Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)合金薄膜随温度的变形过程

图5 Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)合金薄膜室温下的拉伸应力-应变曲线

图6 Ti70-xTa15Zr15Fex (x=0.3、0.6、1.0)合金薄膜的多频阻尼-温度曲线

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