Cu系纳米金属多层膜微柱体的形变与损伤及其尺寸效应<sup>*</sup>

doi:10.11900/0412.1961.2016.00315

金属学报

2016, Vol. 52

Issue (10): 1249-1258 DOI: 10.11900/0412.1961.2016.00315

本期目录 | 过刊浏览

Cu系纳米金属多层膜微柱体的形变与损伤及其尺寸效应^*

孙军(

),张金钰,吴凯,刘刚

西安交通大学金属材料强度国家重点实验室, 西安 710049

SIZE EFFECTS ON THE DEFORMATION AND DAMAGEOF Cu-BASED METALLIC NANOLAYEREDMICRO-PILLARS

Jun SUN(

),Jinyu ZHANG,Kai WU,Gang LIU

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China

引用本文:

孙军, 张金钰, 吴凯, 刘刚. Cu系纳米金属多层膜微柱体的形变与损伤及其尺寸效应^*[J]. 金属学报, 2016, 52(10): 1249-1258.
Jun SUN, Jinyu ZHANG, Kai WU, Gang LIU. SIZE EFFECTS ON THE DEFORMATION AND DAMAGEOF Cu-BASED METALLIC NANOLAYEREDMICRO-PILLARS[J]. Acta Metall Sin, 2016, 52(10): 1249-1258.

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摘要:

纳米金属多层膜材料已成为目前高性能微元器件以及互连结构的核心材料体系, 其服役过程中的变形损伤与断裂是导致系统失效的关键因素. 以本课题组近年来的研究结果为基础, 结合当前国内外有关金属多层膜微柱体塑性变形行为研究的最新进展, 阐述了金属多层膜微柱体微观结构-尺寸约束-服役性能三者之间的关联性, 揭示了金属多层膜微柱体变形模式与损伤的内在规律, 归纳了晶体/晶体与晶体/非晶两类层状结构材料加工硬化/软化行为的微观机理, 并对纳米金属多层膜研究的发展趋势进行了展望.

关键词 ：纳米金属多层膜, 微柱体, 塑性变形, 形变损伤, 尺寸效应

Abstract：

The nanostructured metallic multilayers (NMMs) are widely used as essential components of high performance microelectronics and interconnect structures. The deformation and damage of NMMs is the essential factor leading to the structural failure of these systems. In this paper, based on these experimental results achieved by the authors, as well as the state-of-the-art and progress at home and abroad in the plastic deformation behavior of micropillars of Cu-based NMMs, the correlation of microstructure-size constraint-mechanical performance in the Cu-based nanolayered micropillars is illustrated. The universality of their deformation modes and internal damage mechanisms are revealed, and the work hardening /softening behaviors of two types of nanolaminates, including crystalline/crystalline and crystalline/amorphous NMMs, are summarized. Finally, a brief prospect on the studies of NMMs in future is suggested.

Key words： nanostructured metallic multilayer micro-pillar plastic deformation fracture and damage size effect

收稿日期: 2016-07-19

ZTFLH:

基金资助:* 国家重点基础研究发展计划项目 2010CB631003, 国家自然科学基金项目51571157, 51321003, 51322104和51201123, 高等学校学科创新引智计划项目B06025及陕西省自然科学基金基础研究计划项目2015JM5158资助

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https://www.ams.org.cn/CN/10.11900/0412.1961.2016.00315 或 https://www.ams.org.cn/CN/Y2016/V52/I10/1249

图1 晶体/晶体(fcc/bcc, fcc/fcc, fcc/hcp)与晶体/非晶体系多层膜硬度(H)与单层厚度(h)的关系[33].

图2 晶体/晶体与晶体/非晶体系纳米多层膜微柱体最大强度与h和?的关系

图3 不同微观结构Cu与Cu系多层膜微柱体的应变速率敏感性指数与塑性应变量的关系[49]

图4 金属单层/多层薄膜材料θ-h和单晶Cu微柱体θ-?关系图[38,39,57]及不同多层膜微柱体n-h和多晶Cu n-d关系[58-60]

图5 不同体系多层膜微柱变形模式图

图6 Cu/Zr多层膜微柱形变损伤机制图[38]

图7 Cu/Cu-Zr晶体/非晶多层膜微柱变形模式图

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