Please wait a minute...
Acta Metall Sin  1992, Vol. 28 Issue (7): 78-84    DOI:
Current Issue | Archive | Adv Search |
MICROSTRUCTURE AND INDENTATION BEHAVIOUR OF MULTILAYER Ti-N FILM
WAGENDRISTEL A (Technische Universitat in Wien; Austria); HUANG Rongfang (Institute of Metal Research; Academia Sinica; Shenyang); BANGERT H; YANG Xia; WU Lihang; WANG Haifeng; PANGRATZ H; SKALICKY P (Technische Universitat in Wien; Austria)
Cite this article: 

WAGENDRISTEL A (Technische Universitat in Wien; Austria); HUANG Rongfang (Institute of Metal Research; Academia Sinica; Shenyang); BANGERT H; YANG Xia; WU Lihang; WANG Haifeng; PANGRATZ H; SKALICKY P (Technische Universitat in Wien; Austria). MICROSTRUCTURE AND INDENTATION BEHAVIOUR OF MULTILAYER Ti-N FILM. Acta Metall Sin, 1992, 28(7): 78-84.

Download:  PDF(2613KB) 
Export:  BibTeX | EndNote (RIS)      
Abstract  Observations of cross-sectional Ti/TiN film sample under TEM and of respective depth profiling by secondary ion mass spectroscopy showed that a periodic alternate multilayer structure, i.e., substrate/FeTi/Ti/Ti_2N/TiN/Ti_2N/Ti/Ti_2N/TIN…Ti/Ti_2N/TiN, where FeTi and Ti_2N being transition layer, was found during ion plating. SEM fractograph of indentation sample also showed that the hard coating deformed during indentation, an indentation dip and a pile-up of materials around appeared. With the increase of load applied, the deformation region extended beyond film/substrate boundary and into substrate, initiated interlayer cracking in film and formation of hole at film/substrate interface. It seems that the multilayered Ti/TiN film offered better toughness than single layer TiN film.
Key words:  multilayer Ti-N film      microstructure      indentation     
Received:  18 July 1992     
Service
E-mail this article
Add to citation manager
E-mail Alert
RSS
Articles by authors

URL: 

https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1992/V28/I7/78

1 Yang W M C, Tsakalakos T, Hilliard J E. J Appl Phys, 1977; 48: 876
2 Todorova S, Helmersson. U, Barnett S A, Sundgren J-E, Greene J E. In: IPAT 87, Proc 6th Int Conf on Ion and Plasma Assisted Techniques, Brighton, UK, CEP Consultants Ltd, 1987: 248
3 闻立时,陈秀芝,杨巧勤,郑玉芹,庄育智.真空科学与技术,1987;7(1) :31
4 Karch J, Birringer R, Gleiter H. Nature, 1987; 330: 556
5 Spiller E. In: Attwood D, Henke B L eds., Low Energy X-Ray Diagnostics 1981, New York: AIP, 1981: 131
6 Granqvist C G, Buhrman R A, Wyns J, Sievers A J. Phys Rev Lett, 1976; 37: 625
7 Wen L S, Gong J, Yu B H, Huang R F, Guo L P. In: Huang Liji ed., Thin Films and Beam-Solid Interactions, C-MRS Int 1990 Conf, Vol.4, Beijing, 18-22 June, 1990, Amsterdam: North-Holland, 1991: 219
8 Huang R F, Guo L P, Gong J, Yu B H, Wen L S. In: Proc 3rd Sino-Japan Symposium on Ion Surface Optimization of Materials, October 14-22, 1990, Shanghai, 1990: 58
9 Wen L S, Jiang X, Si C Y.J Vac Sci Technol,1986; 4A: 2682
[1] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189.
[2] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108.
[3] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264.
[4] LU Nannan, GUO Yimo, YANG Shulin, LIANG Jingjing, ZHOU Yizhou, SUN Xiaofeng, LI Jinguo. Formation Mechanisms of Hot Cracks in Laser Additive Repairing Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1243-1252.
[5] LI Jingren, XIE Dongsheng, ZHANG Dongdong, XIE Hongbo, PAN Hucheng, REN Yuping, QIN Gaowu. Microstructure Evolution Mechanism of New Low-Alloyed High-Strength Mg-0.2Ce-0.2Ca Alloy During Extrusion[J]. 金属学报, 2023, 59(8): 1087-1096.
[6] CHEN Liqing, LI Xing, ZHAO Yang, WANG Shuai, FENG Yang. Overview of Research and Development of High-Manganese Damping Steel with Integrated Structure and Function[J]. 金属学报, 2023, 59(8): 1015-1026.
[7] LIU Xingjun, WEI Zhenbang, LU Yong, HAN Jiajia, SHI Rongpei, WANG Cuiping. Progress on the Diffusion Kinetics of Novel Co-based and Nb-Si-based Superalloys[J]. 金属学报, 2023, 59(8): 969-985.
[8] SUN Rongrong, YAO Meiyi, WANG Haoyu, ZHANG Wenhuai, HU Lijuan, QIU Yunlong, LIN Xiaodong, XIE Yaoping, YANG Jian, DONG Jianxin, CHENG Guoguang. High-Temperature Steam Oxidation Behavior of Fe22Cr5Al3Mo-xY Alloy Under Simulated LOCA Condition[J]. 金属学报, 2023, 59(7): 915-925.
[9] ZHANG Deyin, HAO Xu, JIA Baorui, WU Haoyang, QIN Mingli, QU Xuanhui. Effects of Y2O3 Content on Properties of Fe-Y2O3 Nanocomposite Powders Synthesized by a Combustion-Based Route[J]. 金属学报, 2023, 59(6): 757-766.
[10] GUO Fu, DU Yihui, JI Xiaoliang, WANG Yishu. Recent Progress on Thermo-Mechanical Reliability of Sn-Based Alloys and Composite Solder for Microelectronic Interconnection[J]. 金属学报, 2023, 59(6): 744-756.
[11] WU Dongjiang, LIU Dehua, ZHANG Ziao, ZHANG Yilun, NIU Fangyong, MA Guangyi. Microstructure and Mechanical Properties of 2024 Aluminum Alloy Prepared by Wire Arc Additive Manufacturing[J]. 金属学报, 2023, 59(6): 767-776.
[12] FENG Aihan, CHEN Qiang, WANG Jian, WANG Hao, QU Shoujiang, CHEN Daolun. Thermal Stability of Microstructures in Low-Density Ti2AlNb-Based Alloy Hot Rolled Plate[J]. 金属学报, 2023, 59(6): 777-786.
[13] WANG Fa, JIANG He, DONG Jianxin. Evolution Behavior of Complex Precipitation Phases in Highly Alloyed GH4151 Superalloy[J]. 金属学报, 2023, 59(6): 787-796.
[14] ZHANG Dongyang, ZHANG Jun, LI Shujun, REN Dechun, MA Yingjie, YANG Rui. Effect of Heat Treatment on Mechanical Properties of Porous Ti55531 Alloy Prepared by Selective Laser Melting[J]. 金属学报, 2023, 59(5): 647-656.
[15] WANG Changsheng, FU Huadong, ZHANG Hongtao, XIE Jianxin. Effect of Cold-Rolling Deformation on Microstructure, Properties, and Precipitation Behavior of High-Performance Cu-Ni-Si Alloys[J]. 金属学报, 2023, 59(5): 585-598.
No Suggested Reading articles found!