Acta Metall Sin  1992, Vol. 28 Issue (7): 78-84    DOI:

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MICROSTRUCTURE AND INDENTATION BEHAVIOUR OF MULTILAYER Ti-N FILM

WAGENDRISTEL A (Technische Universitat in Wien; Austria); HUANG Rongfang (Institute of Metal Research; Academia Sinica; Shenyang); BANGERT H; YANG Xia; WU Lihang; WANG Haifeng; PANGRATZ H; SKALICKY P (Technische Universitat in Wien; Austria)

WAGENDRISTEL A (Technische Universitat in Wien; Austria); HUANG Rongfang (Institute of Metal Research; Academia Sinica; Shenyang); BANGERT H; YANG Xia; WU Lihang; WANG Haifeng; PANGRATZ H; SKALICKY P (Technische Universitat in Wien; Austria). MICROSTRUCTURE AND INDENTATION BEHAVIOUR OF MULTILAYER Ti-N FILM. Acta Metall Sin, 1992, 28(7): 78-84.

Abstract References Related Articles Recommended Metrics Download:  PDF(2613KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Observations of cross-sectional Ti/TiN film sample under TEM and of respective depth profiling by secondary ion mass spectroscopy showed that a periodic alternate multilayer structure, i.e., substrate/FeTi/Ti/Ti_2N/TiN/Ti_2N/Ti/Ti_2N/TIN…Ti/Ti_2N/TiN, where FeTi and Ti_2N being transition layer, was found during ion plating. SEM fractograph of indentation sample also showed that the hard coating deformed during indentation, an indentation dip and a pile-up of materials around appeared. With the increase of load applied, the deformation region extended beyond film/substrate boundary and into substrate, initiated interlayer cracking in film and formation of hole at film/substrate interface. It seems that the multilayered Ti/TiN film offered better toughness than single layer TiN film. Key words:  multilayer Ti-N film      microstructure      indentation      Received:  18 July 1992      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1992/V28/I7/78 1 Yang W M C, Tsakalakos T, Hilliard J E. J Appl Phys, 1977; 48: 876 2 Todorova S, Helmersson. U, Barnett S A, Sundgren J-E, Greene J E. In: IPAT 87, Proc 6th Int Conf on Ion and Plasma Assisted Techniques, Brighton, UK, CEP Consultants Ltd, 1987: 248 3 闻立时,陈秀芝,杨巧勤,郑玉芹,庄育智.真空科学与技术,1987;7(1) :31 4 Karch J, Birringer R, Gleiter H. Nature, 1987; 330: 556 5 Spiller E. In: Attwood D, Henke B L eds., Low Energy X-Ray Diagnostics 1981, New York: AIP, 1981: 131 6 Granqvist C G, Buhrman R A, Wyns J, Sievers A J. Phys Rev Lett, 1976; 37: 625 7 Wen L S, Gong J, Yu B H, Huang R F, Guo L P. In: Huang Liji ed., Thin Films and Beam-Solid Interactions, C-MRS Int 1990 Conf, Vol.4, Beijing, 18-22 June, 1990, Amsterdam: North-Holland, 1991: 219 8 Huang R F, Guo L P, Gong J, Yu B H, Wen L S. In: Proc 3rd Sino-Japan Symposium on Ion Surface Optimization of Materials, October 14-22, 1990, Shanghai, 1990: 58 9 Wen L S, Jiang X, Si C Y.J Vac Sci Technol,1986; 4A: 2682 [1] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189. [2] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108. [3] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264. 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