Acta Metall Sin  1995, Vol. 31 Issue (15): 139-144    DOI:

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STRUCTURE AND PROPERTIES OF DIAMOND LIKE CARBON FILMS BY LOW ENERGY ION BEAM ASSISTED DEPOSITION USING A SINGLE ION SOURCE

ZHU Hong; LIU Xianghuai; REN Congxin; CHEN Guoliang; ZOU Shichang (Ion Beam Lahoratory Shanghai Institute of Metallurgy; Chinese Academy of Sciences;Shanghai 200050)

ZHU Hong; LIU Xianghuai; REN Congxin; CHEN Guoliang; ZOU Shichang (Ion Beam Lahoratory Shanghai Institute of Metallurgy; Chinese Academy of Sciences;Shanghai 200050). STRUCTURE AND PROPERTIES OF DIAMOND LIKE CARBON FILMS BY LOW ENERGY ION BEAM ASSISTED DEPOSITION USING A SINGLE ION SOURCE. Acta Metall Sin, 1995, 31(15): 139-144.

Abstract References Related Articles Recommended Metrics Download:  PDF(428KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Amorphous carbon films with a smooth surface and a good adhesion to silicon and steel substrates have been prepared by ion beam assisted deposition (IBAD) using a single ion source. The energy of Ar ion ranged from 400 to 1500 eV. The structure and composition of the films were characterized using Raman spectroscopy, FTIR, HRTEM, TED. SEM, ERD and RBS. Electrical resistivity, microhardness and friction coefficient were tested to evaluate the films. The films was proved to be diamond like carbon (DLC). The hydrogen content measured by ERD is about 2.05 at.-%. The carbon hydrogen bond (C-H) seemes unformed. As ion energy and beam current increased. microhardness and friction coefficient increased. but electrical resistivity decreased. The increased microhardness is due to the increased film density and the decreased electrical resistivity is due to the decreased concentration of sp~3 bonds in the film. Key words:  diamond like carbon film      ion beam assisted deposition      structure      property      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1995/V31/I15/139 1WolfGK,EnsingerW．NuclInstrMeth,1991;B59//60:1732ZhangYuchun,WuYuming．RenCongxin,FuXinding,ChenGuoming．NuclInstrMeth,1985:B6:4473DillonRO,WoollamJohnA．PhysRev,1984;B29:34824KnightDS,WhiteWB．JMaterRes,1989;4:3855TsaiH,BogyDB,JVacSciTechnol,1987;A5:32876CoudercP,CaterineY．ThinSolidFilms,1987;146:937NabotJPh,AndreB．PaidassiS．SurfCoatTechnol．1990;43//44:718SavvidesN,windowB．JVacSciTechnol,1985;A3:2386 [1] MA Dexin, ZHAO Yunxing, XU Weitai, WANG Fu. Effect of Gravity on Directionally Solidified Structure of Superalloys[J]. 金属学报, 2023, 59(9): 1279-1290. [2] WANG Lei, LIU Mengya, LIU Yang, SONG Xiu, MENG Fanqiang. Research Progress on Surface Impact Strengthening Mechanisms and Application of Nickel-Based Superalloys[J]. 金属学报, 2023, 59(9): 1173-1189. [3] GONG Shengkai, LIU Yuan, GENG Lilun, RU Yi, ZHAO Wenyue, PEI Yanling, LI Shusuo. Advances in the Regulation and Interfacial Behavior of Coatings/Superalloys[J]. 金属学报, 2023, 59(9): 1097-1108. [4] ZHANG Jian, WANG Li, XIE Guang, WANG Dong, SHEN Jian, LU Yuzhang, HUANG Yaqi, LI Yawei. Recent Progress in Research and Development of Nickel-Based Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1109-1124. [5] ZHANG Leilei, CHEN Jingyang, TANG Xin, XIAO Chengbo, ZHANG Mingjun, YANG Qing. Evolution of Microstructures and Mechanical Properties of K439B Superalloy During Long-Term Aging at 800oC[J]. 金属学报, 2023, 59(9): 1253-1264. [6] LU Nannan, GUO Yimo, YANG Shulin, LIANG Jingjing, ZHOU Yizhou, SUN Xiaofeng, LI Jinguo. Formation Mechanisms of Hot Cracks in Laser Additive Repairing Single Crystal Superalloys[J]. 金属学报, 2023, 59(9): 1243-1252. [7] ZHENG Liang, ZHANG Qiang, LI Zhou, ZHANG Guoqing. Effects of Oxygen Increasing/Decreasing Processes on Surface Characteristics of Superalloy Powders and Properties of Their Bulk Alloy Counterparts: Powders Storage and Degassing[J]. 金属学报, 2023, 59(9): 1265-1278. [8] CHEN Liqing, LI Xing, ZHAO Yang, WANG Shuai, FENG Yang. Overview of Research and Development of High-Manganese Damping Steel with Integrated Structure and Function[J]. 金属学报, 2023, 59(8): 1015-1026. [9] LI Jingren, XIE Dongsheng, ZHANG Dongdong, XIE Hongbo, PAN Hucheng, REN Yuping, QIN Gaowu. Microstructure Evolution Mechanism of New Low-Alloyed High-Strength Mg-0.2Ce-0.2Ca Alloy During Extrusion[J]. 金属学报, 2023, 59(8): 1087-1096. [10] DING Hua, ZHANG Yu, CAI Minghui, TANG Zhengyou. Research Progress and Prospects of Austenite-Based Fe-Mn-Al-C Lightweight Steels[J]. 金属学报, 2023, 59(8): 1027-1041. [11] LIU Xingjun, WEI Zhenbang, LU Yong, HAN Jiajia, SHI Rongpei, WANG Cuiping. Progress on the Diffusion Kinetics of Novel Co-based and Nb-Si-based Superalloys[J]. 金属学报, 2023, 59(8): 969-985. [12] YUAN Jianghuai, WANG Zhenyu, MA Guanshui, ZHOU Guangxue, CHENG Xiaoying, WANG Aiying. Effect of Phase-Structure Evolution on Mechanical Properties of Cr2AlC Coating[J]. 金属学报, 2023, 59(7): 961-968. [13] SUN Rongrong, YAO Meiyi, WANG Haoyu, ZHANG Wenhuai, HU Lijuan, QIU Yunlong, LIN Xiaodong, XIE Yaoping, YANG Jian, DONG Jianxin, CHENG Guoguang. High-Temperature Steam Oxidation Behavior of Fe22Cr5Al3Mo-xY Alloy Under Simulated LOCA Condition[J]. 金属学报, 2023, 59(7): 915-925. [14] ZHANG Deyin, HAO Xu, JIA Baorui, WU Haoyang, QIN Mingli, QU Xuanhui. Effects of Y2O3 Content on Properties of Fe-Y2O3 Nanocomposite Powders Synthesized by a Combustion-Based Route[J]. 金属学报, 2023, 59(6): 757-766. [15] LIU Junpeng, CHEN Hao, ZHANG Chi, YANG Zhigang, ZHANG Yong, DAI Lanhong. Progress of Cryogenic Deformation and Strengthening-Toughening Mechanisms of High-Entropy Alloys[J]. 金属学报, 2023, 59(6): 727-743. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed