Impact of Residual Oxygen on Hardness of Nano Structured TiN+Si3N4 Film

Acta Metall Sin

2004, Vol. 40

Issue (10): 1037-1040 DOI:

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Impact of Residual Oxygen on Hardness of Nano Structured TiN+Si3N4 Film

MA Dayan; MA Shengli; XU Kewei;S.Veprek

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MA Dayan; MA Shengli; XU Kewei; S.Veprek. Impact of Residual Oxygen on Hardness of Nano Structured TiN+Si3N4 Film. Acta Metall Sin, 2004, 40(10): 1037-1040 .

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Abstract Using direct current plasma enhanced chemical vapor deposition (PCVD) techniques, the nanocomposite films of nc-TiN + a-Si3N4 were synthesized. The detrimental effects of residual oxygen on the films hardness were explored. A minor content of residual oxygen can strongly decrease the hardness of the superhard film. Oxygen impurity of 1%-1.5% (atomic fraction) can make the hardness of film decrease to about 30 GPa as compared to 45-55 GPa for the film with below 0.2% oxygen, which is related to the formation of SiOx at interface of crystalline.

Key words: PCVD TiN Si3N4

Received: 28 November 2003

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	MA Dayan
	MA Shengli
	XU Kewei
	S.Veprek

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y2004/V40/I10/1037

[1] Archer N J. Thin Solid Films, 1981; 80: 221
[2] Rebenne H E, Bhot D G. Surf Coat Technol, 1994; 63: 1
[3] Subramanian C, Strafford K N. Wear, 1993; 165: 85
[4] Matthes B, Broszeit E, Kloos K H. Surf Coat Technol,1993; 57: 97
[5] Heim D, Hochreiter R. Surf Coat Technol, 1998; 98: 1553
[6] Veprek S, Reiprich S. Thin Solid Films, 1995; 268: 64
[7] Veprek S, Niederhofer A, Moto K, Bolom T, MannlingH D, Nesladek P, Dollinger G, Bergmaier A. Surf CoatTechnol, 2000; 133-134: 152
[8] Veprek S, Reiprich S, Li S Z. Appl Phys Lett, 1995; 66:2640
[9] Durand-Drouhin O, Santana A E, Karimi A, Derflinger VH, Schutze A. Surf Coat Technol, 2003; 163-164: 260
[10] Hilton M R. Thin Solid films, 1987; 183: 278
[11] Oguri K, Fujita H, Arai T. Thin Solid films, 1991; 195:77,

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