DETERMINATION OF TEXTURE STATE OF THIN FILM ZrO_2 BY ELECTRON DIFFRACTION PATTERN

Acta Metall Sin

1993, Vol. 29

Issue (6): 95-96 DOI:

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DETERMINATION OF TEXTURE STATE OF THIN FILM ZrO_2 BY ELECTRON DIFFRACTION PATTERN

WANG Yinghua;Department of Materials Science and Engineering.Tsinghua University;Beijing 100084

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WANG Yinghua;Department of Materials Science and Engineering.Tsinghua University;Beijing 100084. DETERMINATION OF TEXTURE STATE OF THIN FILM ZrO_2 BY ELECTRON DIFFRACTION PATTERN. Acta Metall Sin, 1993, 29(6): 95-96.

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Abstract A method for determining thin film texture by electron diffraction pattern ispresented. Using this method, the texture state of the ZrO_2 thin film has been determined.

Key words: texture thin film electron diffraction

Received: 18 June 1993

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1993/V29/I6/95

1 Cullity B D. Elements of X-Ray Diffraction. Reading Mass: Addison-Wesley, 1978
2 王英华.X光衍射技术基础.北京:原子能出版社,1987

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