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金属学报  2018, Vol. 54 Issue (3): 357-366    DOI: 10.11900/0412.1961.2017.00371
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微纳米尺度金属导电材料热疲劳研究进展
张广平1(), 陈红蕾1,2, 罗雪梅1, 张滨3
1中国科学院金属研究所沈阳材料科学国家(联合)实验室 沈阳 110016
2中国科学技术大学材料科学与工程学院 沈阳 110016
3 东北大学材料科学与工程学院材料各向异性与织构教育部重点实验室 沈阳 110819
Progress in Thermal Fatigue of Micro/Nano-ScaleMetal Conductors
Guangping ZHANG1(), Honglei CHEN1,2, Xuemei LUO1, Bin ZHANG3
1 Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
2 School of Materials Science and Engineering, University of Science and Technology of China, Shenyang 110016, China
3 Key Laboratory for Anisotropy and Texture of Materials, Ministry of Education, School of Materials Science and Engineering, Northeastern University, Shenyang 110819, China
引用本文:

张广平, 陈红蕾, 罗雪梅, 张滨. 微纳米尺度金属导电材料热疲劳研究进展[J]. 金属学报, 2018, 54(3): 357-366.
Guangping ZHANG, Honglei CHEN, Xuemei LUO, Bin ZHANG. Progress in Thermal Fatigue of Micro/Nano-ScaleMetal Conductors[J]. Acta Metall Sin, 2018, 54(3): 357-366.

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摘要: 

世界已逐渐进入以物联网和智能制造为主导的工业4.0时代,特别是人工智能和大数据处理的强烈需求,微纳米尺度器件的研发制造及广泛使用的日趋活跃使得小尺度材料得到广泛关注。由于这些材料的几何尺度和微观结构尺度的约束效应,其热疲劳损伤行为与块体材料不同。同时,材料尺度由微米向纳米量级的转变也会引起损伤机制的转变,使材料表现出不同的损伤形式,产生显著的尺寸效应。本文综述了近年来国内外开展的有关金属薄膜/线的热疲劳实验方法、热疲劳损伤行为及演化和热疲劳影响因素的研究进展,探讨了微纳米尺度金属材料热疲劳的微观机制和尺寸效应,并对这一领域的研究前景进行展望。
关键词 ： 金属薄膜,  互连线,  交流电,  热疲劳,  尺寸效应    
Abstract：

The world has gradually entered the industrial 4.0 Era, which is dominated by the Internet of Things (IOT) and intelligent manufacturing. Especially, strong requirement for artificial intelligence and big data processing, the development and preparation of micro/nano electronic devices is becoming increasingly active, and much more concerns have been attracted to small-scale materials. Because of the constraint effect of geometric and microstructural dimensions of these materials, the thermal fatigue damage behavior is different from that of the bulk counterparts. At the same time, the change of the material scale from microns to nanometers also results in the transformation of the deformation mechanism, so that the materials exhibit different damage behaviors and significant size effects. In this paper, thermal fatigue testing methods, thermal fatigue damage and evolution, and the factors influencing thermal fatigue properties of metal film/line are reviewed, the corresponding mechanism of thermal fatigue and the size effect of the micro/nano-scale metals are discussed. The prospective research of this field in the future is addressed.
Key words： thin metal film    interconnect    alternating current    thermal fatigue    size effect
收稿日期: 2017-09-05     
基金资助:资助项目 国家自然科学基金项目Nos.51371047、51671050和51601198
作者简介:

作者简介 张广平,男,1966年生,研究员,博士
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https://www.ams.org.cn/CN/10.11900/0412.1961.2017.00371      或      https://www.ams.org.cn/CN/Y2018/V54/I3/357

图1  交流电诱发金属互连线热疲劳损伤实验系统示意图
Film Substrate t / nm W / μm D / μm j / (MAcm-2) f / Hz Ref.
Cu/Ta Surface 100 8~15 0.5±0.2 14~24 200 [33]
oxidized Si 300 8~15 1.5±0.5 14~24 200
200 8~15 1.0±0.5 14~24 200, 20000 [43]
300 0.5±0.2 14~24 200
Cu/Ta/SiNx Surface 200 8 1.5±0.5 10~40 200, 20000 [35]
oxidized Si 300 8 0.5±0.2 10~40 200, 20000
Cu/Ta/SiNx with/without Surface 200 8 1.3±0.5 10~40 20000 [34]
photoresist encapsulation oxidized Si
Al-1%Si (atomic fraction) Surface 550 3.3 - 10, 11 200 [17]
with/without photoresist oxidized Si
encapsulation
Al-1%Si (atomic fraction) Surface 550 3.3 0.3~0.6 12.2±0.3 200 [17]
with SiNx encapsulation oxidized Si
Cu Surface 60 5, 10, 15 0.055±0.02 3.2~26.5 50 [37]
oxidized Si
Au SiO2 200 2 0.074±0.011 3.5~11.5 50 [45]
Au Surface 35 0.1~5 0.032±0.012 3.5~35.2 100 [38]
oxidized Si
表1  交流电热疲劳研究的材料体系以及实验参数[17,33~35,37,38,43,45]
图2  不同条件下交流电诱发金属线热疲劳应变幅-寿命关系[33~35,37,42,43,45~47]
图3  典型的<100>取向晶粒和<111>取向晶粒的损伤形貌及演化[34]
图4  热疲劳之后的(111)面外取向晶粒的透射电镜像[50]
图5  微小尺度金属薄膜机械疲劳与热疲劳损伤失效机制和尺度的关系图
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