| 
							
      					 | 
  					 
  					
    					 | 
   					 
   										
    					| Cu/Sn-52In/Cu微焊点液-固电迁移行为研究 | 
  					 
  					  										
						张志杰1,黄明亮2( ) | 
					 
															
					1 江苏科技大学材料科学与工程学院 镇江 212003 2 大连理工大学材料科学与工程学院 大连 116024 | 
					 
										
						 | 
					 
   										
    					| Liquid-Solid Electromigration Behavior of Cu/Sn-52In/Cu Micro-Interconnect | 
  					 
  					  					  					
						Zhijie ZHANG1,Mingliang HUANG2( ) | 
					 
															
						1 School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003, China 2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China | 
					   
									 
				
				引用本文: 
				
								张志杰,黄明亮. Cu/Sn-52In/Cu微焊点液-固电迁移行为研究[J]. 金属学报, 2017, 53(5): 592-600.	
																												 																				Zhijie ZHANG,
																												Mingliang HUANG. 
				Liquid-Solid Electromigration Behavior of Cu/Sn-52In/Cu Micro-Interconnect[J]. Acta Metall Sin, 2017, 53(5): 592-600.	                                                        				  
				
				
					
						
							
								
									
									
									
									
									 
          
          
            
             
			              
            
									            
									                
																														  
																 | [1]  | Chen L D, Huang M L, Zhou S M.Effect of electromigration on intermetallic compound formation in line-type Cu/Sn/Cu interconnect[J]. J. Alloys Compd., 2010, 504: 535 |  | [2]  | Jung Y, Yu J.Electromigration induced kirkendall void growth in Sn-3.5Ag/Cu solder joints[J]. J. Appl. Phys., 2014, 115: 083708 |  | [3]  | Huang M L, Zhou S M, Chen L D.Electromigration-induced interfacial reactions in Cu/Sn/electroless Ni-P solder interconnects[J]. J. Electron. Mater., 2012, 41: 730 |  | [4]  | Chen C, Tong H M, Tu K N.Electromigration and thermomigration in Pb-free flip-chip solder joints[J]. Annu. Rev. Mater. Res., 2010, 40: 531 |  | [5]  | Huang M L, Ye S, Zhao N.Current-induced interfacial reactions in Ni/Sn-3Ag-0.5Cu/Au/Pd(P)/Ni-P flip chip interconnect[J]. J. Mater. Res., 2011, 26: 3009 |  | [6]  | Chen C, Liang S W.Electromigration issues in lead-free solder joints[J]. J. Mater. Sci.: Mater. Electron., 2007, 18: 259 |  | [7]  | Yeh E C C, Choi W J, Tu K N. Current-crowding-induced electromigration failure in flip chip solder joints[J]. Appl. Phys. Lett., 2002, 80: 580 |  | [8]  | Cahoon J R.A modified “Hole” theory for solute impurity diffusion in liquid metals[J]. Metall. Mater. Trans., 1997, 28A: 583 |  | [9]  | Hu Y C, Lin Y H, Kao C R, et al.Electromigration failure in flip chip solder joints due to rapid dissolution of copper[J]. J. Mater. Res., 2003, 18: 2544 |  | [10]  | Liao C N, Chung C P, Chen W T.Electromigration-induced Pb segregation in eutectic Sn-Pb molten solder[J]. J. Mater. Res., 2005, 20: 3425 |  | [11]  | Gu X, Chan Y C.Electromigration in line-type Cu/Sn-Bi/Cu solder joints[J]. J. Electron. Mater., 2008, 37: 1721 |  | [12]  | Huang M L, Zhou Q, Zhao N, et al.Reverse polarity effect and cross-solder interaction in Cu/Sn-9Zn/Ni interconnect during liquid-solid electromigration[J]. J. Mater. Sci., 2014, 49: 1755 |  | [13]  | Huang M L, Zhou Q, Zhao N, et al.Abnormal diffusion behavior of Zn in Cu/Sn-9wt.% Zn/Cu interconnects during liquid-solid electromigration[J]. J. Electron. Mater., 2013, 42: 2975 |  | [14]  | Huang M L, Zhang Z J, Zhao N, et al.A synchrotron radiation real-time in situ imaging study on the reverse polarity effect in Cu/Sn-9Zn/Cu interconnect during liquid-solid electromigration[J]. Scr. Mater., 2013, 68: 853 |  | [15]  | Huang M L, Zhang Z J, Zhao N, et al.In situ study on reverse polarity effect in Cu/Sn-9Zn/Ni interconnect undergoing liquid-solid electromigration[J]. J. Alloys Compd., 2015, 619: 667 |  | [16]  | Huang J R, Tsai C M, Lin Y W, et al.Pronounced electromigration of Cu in molten Sn-based solders[J]. J. Mater. Res., 2008, 23: 250 |  | [17]  | Daghfal J P, Shang J K.Current-induced phase partitioning in eu |  
  | 
															   
																													 
									             
									           
             
			            			 
			 
             
												
											    	
											        	 | 
											        	Viewed | 
											         
													
											        	 | 
											        	 | 
											         
											      	
												         | 
												        
												        	Full text 
												          	
												         | 
											        	
												        	
												        	 
												        	
												          	 
												          	
												          	
														 | 
													 
													
												         | 
												         | 
													 
													
												         | 
												        
												        	Abstract 
												          	
														 | 
												        
															
															 
															
															
												         | 
													 
													
												         | 
												         | 
													 
													
												         | 
												        Cited  | 
												        
												        	
												         | 
													 
													
												         | 
												         | 
												         | 
													 
													
													    |   | 
													    Shared | 
													       | 
												  	 
												  	
													     | 
													     | 
													     | 
											  		 
											  		
													    |   | 
													    Discussed | 
													       | 
												  	 
											 
											 
             
           
      
									
									
		
									
									
									
									
									
									 | 
								 
							 
						 | 
					 
				 
			
		 |