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离子注入Cu薄膜的氧化行为研究 |
赵新清 柳百新 |
北京航空材料研究院;北京 100095 |
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引用本文:
赵新清; 柳百新 . 离子注入Cu薄膜的氧化行为研究[J]. 金属学报, 2000, 36(11): 1187-1191 .
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