Abstract Using an unbalanced magnetron sputtering, hydrogen-free titanium-doped diamond-like carbon (Ti-DLC) and hydrogen-free pure diamond-like carbon (DLC) were deposited. Sputtering from titanium target and graphitic targets simultaneously to form Ti-DLC coatings, the sputtering power of titanium target was varied so the titanium concentration in the Ti-DLC coatings could be controlled from 1.9 to 34at.%. The morphology, structure were investigated by Raman、XPS、XRD and AFM. Results show that all the Ti-DLC coatings have a similar Raman spectrum with pure DLC, but dropping titanium will cause a transform from sp3 configuration to sp2 configuration. Results also show that Ti exists in a form of TiC small crystallites in the DLC structure. Compare with Ti-DLC coatings, pure DLC coating was much smoother, but for some rough base surface, titanium dropping was benefit for getting a smoother coating surface.
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