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Effect of Cross Rolling Cycle on the Deformed and Recrystallized Gradient in High-Purity Tantalum Plate |
Jialin ZHU1,Shifeng LIU1( ),Yu CAO1,Yahui LIU1,Chao DENG1,2,Qing LIU1,2 |
1. College of Materials Science and Engineering, Chongqing University, Chongqing 400044, China 2. Electron Microscopy Center, Chongqing University, Chongqing 400044, China |
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Cite this article:
Jialin ZHU,Shifeng LIU,Yu CAO,Yahui LIU,Chao DENG,Qing LIU. Effect of Cross Rolling Cycle on the Deformed and Recrystallized Gradient in High-Purity Tantalum Plate. Acta Metall Sin, 2019, 55(8): 1019-1033.
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Abstract Cross rolling plays an important role in the production of high-quality tantalum (Ta) sputtering targets, which are crucial in achieving thin films for micro-electronic components. However, the effect of the cross rolling cycle on the microstructure homogeneity is always ignored. Therefore, 1 and 2 cycle samples were obtained by a new approach named a 135° cross rolling. The deformation and recrystallization behavior of high-purity Ta plate then was systematically compared between 1 and 2 cross rolling cycles, aiming to elucidate why the increase of cross rolling cycles can effectively ameliorate the microstructure gradient along the thickness direction. XRD results showed that the 2 cycle sample through the thickness consisted of a relatively homogenous {111}<uvw> ([111]//normal direction (ND)) and {100}<uvw> ([100]//ND) fibers while texture distribution was extremely uneven for the 1 cycle sample. The stored energy was quantitatively analyzed by X-ray line profile analysis (XLPA) and it was found that the stored energy across the thickness distributed more homogeneously for the 2 cycle sample. Misorientation characteristics of deformed grains with different rolling cycles were analyzed in detail by visualizing the misorientation angle based on an electron backscatter diffraction dataset. Many well-defined microbands and microshear bands occurred in the {111} grain at the center layer for the 1 cycle sample, while it can be effectively destroyed with the increase of the cross rolling cycle and few peaks occurred in the "point to point" plot. Kernel average misorientation (KAM) and grain reference orientation deviation-hyper (GROD-Hyper) further confirmed their differences. Then, micorband and microshear bands were detailedly characterized by TEM, and the analysis based on relative Schmid factor suggested that the primary slip system activated in the {111} grains led to the formation of microbands in the 1 cycle sample, while multiple slip systems appeared to be activated in the 2 cycle sample and deformation was more uniform. Upon annealing, the remarkably reduced stored energy gap between the {111} and {100} grain as well as the relatively homogeneous deformation microstructure between the surface and center layer for the 2 cycle sample was conductive to synchronous recrystallization together, while the high stored energy as driving force and preferential nucleation sites at the center region led to faster recrystallization for the 1 cycle sample. The recrystallization microstructure was relatively uniform and smaller variation in grain size for the 2 cycle sample through the thickness, which was beneficial to the application of Ta sputtering target. Therefore, the increase of cross rolling cycle can ameliorate the recrystallized kinetics and microstructure of high purity Ta plate.
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Received: 12 October 2018
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Fund: Supported by Foundation:National Natural Science Foundation of China(Nos.U51421001 and 51701302) |
[1] | Michaluk C A. Correlating discrete orientation and grain size to the sputter deposition properties of tantalum [J]. J. Electron. Mater., 2002, 31: 2 | [2] | R W Jr Buckman. New applications for tantalum and tantalum alloys [J]. JOM, 2000, 52(3): 40 | [3] | Levine B R, Sporer S, Poggie R A, et al. Experimental and clinical performance of porous tantalum in orthopedic surgery [J]. Biomaterials, 2006, 27: 4671 | [4] | Patil N, Lee K, Goodman S B. Porous tantalum in hip and knee reconstructive surgery [J]. J. Biomed. Mater. Res., 2009, 89B: 242 | [5] | Sandim H R Z, Martins J P, Pinto A L, et al. Recrystallization of oligocrystalline tantalum deformed by cold rolling [J]. Mater. Sci. Eng., 2005, A392: 209 | [6] | Sandim H R Z, Martins J P, Padilha A F. Orientation effects during grain subdivision and subsequent annealing in coarse-grained tantalum [J]. Scr. Mater., 2001, 45: 733 | [7] | Raabe D, Schlenkert G, Weisshaupt H, et al. Texture and microstructure of rolled and annealed tantalum [J]. Mater. Sci. Technol., 1994, 10: 299 | [8] | Wright S I, Gray G T, Rollett A D. Textural and microstructural gradient effects on the mechanical behavior of a tantalum plate [J]. Metall. Mater. Trans., 1994, 25A: 1025 | [9] | Zhang Z Q, Zhang J, Liu S F, et al. Processing technology of high-purity tantalum sputtering target material [P]. Chin Pat, CN201010599296.5, 2011 | [9] | (张志清, 张 静, 刘施峰等. 一种高纯钽溅射靶材的加工工艺 [P]. 中国专利, CN201010599296.5, 2011) | [10] | Pokross C. Controlling the texture of tantalum plate [J]. JOM, 1989, 41(10): 46 | [11] | Davenport S B, Higginson R L. Strain path effects under hot working: An introduction [J]. J. Mater. Process. Technol., 2000, 98: 267 | [12] | Oertel C G, Hünsche I, Skrotzki W, et al. Influence of cross rolling and heat treatment on texture and forming properties of molybdenum sheets [J]. Int. J. Refract. Met. Hard Mater., 2010, 28: 722 | [13] | Tóth L S, Beausir B, Orlov D, et al. Analysis of texture and R value variations in asymmetric rolling of IF steel [J]. J. Mater. Process. Technol., 2012, 212: 509 | [14] | Chino Y, Sassa K, Kamiya A, et al. Enhanced formability at elevated temperature of a cross-rolled magnesium alloy sheet [J]. Mater. Sci. Eng., 2006, A441: 349 | [15] | Clark J B, Garrett R K, Jungling T L, et al. Influence of transverse rolling on the microstructural and texture development in pure tantalum [J]. Metall. Trans., 1992, 23A: 2183 | [16] | Field D P, Yanke J M, Mcgowan E V, et al. Microstructural development in asymmetric processing of tantalum plate [J]. J. Electron. Mater., 2005, 34: 1521 | [17] | Mathaudhu S N, Barber R E, Hartwig K T. Microstructural refinement of tantalum for Nb3Sn superconductor diffusion barriers [J]. IEEE Trans. Appl. Supercond., 2005, 15: 3434 | [18] | Liu S F, Fan H Y, Deng C, et al. Through-thickness texture in clock-rolled tantalum plate [J]. Int. J. Refract. Met. Hard Mater., 2015, 48: 194 | [19] | Fan H Y, Liu S F, Li L J, et al. Largely alleviating the orientation dependence by sequentially changing strain paths [J]. Mater. Des., 2016, 97: 464 | [20] | Rajmohan N, Hayakawa Y, Szpunar J A, et al. Neutron diffraction method for stored energy measurement in interstitial free steel [J]. Acta Mater., 1997, 45: 2485 | [21] | Ruestes C J, Stukowski A, Tang Y, et al. Atomistic simulation of tantalum nanoindentation: Effects of indenter diameter, penetration velocity, and interatomic potentials on defect mechanisms and evolution [J]. Mater. Sci. Eng., 2014, A613: 390 | [22] | Ikehata H, Nagasako N, Kuramoto S, et al. Designing new structural materials using density functional theory: The example of gum metalTM [J]. MRS Bull., 2006, 31: 688 | [23] | Park Y B, Lee D N, Gottstein G. The evolution of recrystallization textures in body centred cubic metals [J]. Acta Mater., 1998, 46: 3371 | [24] | Liu Y H, Liu S F, Zhu J L, et al. Strain accommodation of <110>-normal direction-oriented grains in micro-shear bands of high-purity tantalum [J]. J. Mater. Sci., 2018, 53: 12543 | [25] | Bocos J L, Novillo E, Petite M M, et al. Aspects of orientation-dependent grain growth in extra-low carbon and interstitial-free steels during continuous annealing [J]. Metall. Mater. Trans., 2003, 34A: 827 | [26] | Haouaoui M, Hartwig K T, Payzant E A. Effect of strain path on texture and annealing microstructure development in bulk pure copper processed by simple shear [J]. Acta Mater., 2005, 53: 801 | [27] | Huh M Y, Engler O, Raabe D. On the influence of cross-rolling on shear band formation and texture evolution in low carbon steel sheets [J]. Textures Microstruct., 1995, 24: 225 | [28] | Vandermeer R A, Snyder W B. Recovery and recrystallization in rolled tantalum single crystals [J]. Metall. Trans., 1979, 10A: 1031 | [29] | Chen Q Z, Duggan B J. On cells and microbands formed in an interstitial-free steel during cold rolling at low to medium reductions [J]. Metall. Mater. Trans., 2004, 35A: 3423 | [30] | Hughes D A, Hansen N. Microstructural evolution in nickel during rolling and torsion [J]. Mater. Sci. Technol., 1991, 7: 544 | [31] | Morikawa T, Senba D, Higashida K, et al. Micro shear bands in cold-rolled austenitic stainless steel [J]. Mater. Trans. JIM, 2007, 40: 891 | [32] | Meyers M A, Nesterenko V F, LaSalvia J C, et al. Shear localization in dynamic deformation of materials: Microstructural evolution and self-organization [J]. Mater. Sci. Eng., 2001, A317: 204 | [33] | Luo J R, Godfrey A, Liu W, et al. Twinning behavior of a strongly basal textured AZ31 Mg alloy during warm rolling [J]. Acta Mater., 2012, 60: 1986 | [34] | Hines J A, Vecchio K S. Recrystallization kinetics within adiabatic shear bands [J]. Acta Mater., 1997, 45: 635 | [35] | Dey S, Gayathri N, Bhattacharya M, et al. In Situ XRD studies of the process dynamics during annealing in cold-rolled copper [J]. Metall. Mater. Trans., 2015, 47A: 6281 | [36] | Choi S H. Monte Carlo technique for simulation of recrystallization texture in interstitial free steels [J]. Mater. Sci. Forum, 2002, 408-412: 469 | [37] | Choi S H, Jin Y S. Evaluation of stored energy in cold-rolled steels from EBSD data [J]. Mater. Sci. Eng., 2004, A371: 149 |
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