DECONVOLUTION OF THE

doi:10.3724/SP.J.1037.2011.00687

Acta Metall Sin

2012, Vol. 48

Issue (2): 245-249 DOI: 10.3724/SP.J.1037.2011.00687

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DECONVOLUTION OF THE "ZERO PROFILE" FROM THE DIFFUSION PROFILE MEASURED BY SECONDARY ION MASS SPECTROSCOPY

WANG Haili, WANG Zhenbo, LU Ke

Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016

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WANG Haili WANG Zhenbo LU Ke. DECONVOLUTION OF THE "ZERO PROFILE" FROM THE DIFFUSION PROFILE MEASURED BY SECONDARY ION MASS SPECTROSCOPY. Acta Metall Sin, 2012, 48(2): 245-249.

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Abstract The depth profile measured by secondary ion mass spectroscopy is influenced by factors such as the atomic mixing caused by ion injection, the crater edge, the crystallographic orientation of grains and the surface roughness etc., resulting in the deviation of the measured profile from the real distribution of the solute atoms. A depth profile measured before diffusion annealing or the "zero profile"is a comprehensive characterization of all the factors that influence the depth profile after annealing. In the present study, a mathematic method using Fourier serials to effectively deconvolute the real profile from the measured profile and"zero profile"is proposed. And the effects of "zero profile" on the diffusion properties of Zn in a coarse grained Cu and a nanostructured Cu produced by dynamic plastic deformation (DPD) at liquid nitrogen temperature (LNT) are analyzed with the above method.

Key words: secondary ion mass spectroscopy depth profile zero profile diffusion dynamic plastic deformation

Received: 04 November 2011

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Supported by National Natural Science Foundation of China (No.50890171), National Basic Research Program of China (No.2012CB932201) and International Science & Technology Cooperation Program of China (No.2010DFB54010)

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