Acta Metall Sin  1989, Vol. 25 Issue (6): 96-101    DOI:

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STRUCTURE OF SPUTTERED Co-Cr-Al-Y COATING

LOU Hanyi;WANG Fuhui;JI Lirun;ZHANG Lixin Institute of Corrosion and Protection of Metals; Academia Sinica; Shenyang LOU Hanyi;associate professor; Institute of Corrosion And Protection of Metals;Academia Sinica. Shenvana 110015

LOU Hanyi;WANG Fuhui;JI Lirun;ZHANG Lixin Institute of Corrosion and Protection of Metals; Academia Sinica; Shenyang LOU Hanyi;associate professor; Institute of Corrosion And Protection of Metals;Academia Sinica. Shenvana 110015. STRUCTURE OF SPUTTERED Co-Cr-Al-Y COATING. Acta Metall Sin, 1989, 25(6): 96-101.

Abstract References Related Articles Recommended Metrics Download:  PDF(1106KB)  Export:  BibTeX | EndNote (RIS)       Abstract  The phase composition of Co-30Cr-6Al-0.5Y coating deposited by plan-ar magnetron sputtering as well as the effect of sputtering parameters on it havebeen investigated. The sputtered coating is composed of hcp ε-phase or fcc α-phaseof Co solid solution with a minority β-CoAl intermetallic phase. The hcp ε-Cophase and the fcc α-Co phase assumed a <100> and <110> preferred orientationrespectively. Both phase type and orientation extent depend on the sputtering para-meters. If the substrate surface is paralleled to the target face during sputtering, thecoating will be of fine crystal with compact structure and smooth surface; if it isrotated, the coating will be to the contrary. Key words:  magnetron sputtering      Co-Cr-Al-Y coating      Received:  18 June 1989      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1989/V25/I6/96 1 Boone D H. Mater Sci Technol, 1986; 2: 220 2 Rickerby D S, Wood M I. J Vac Sci Technol, 1986; A4: 2557 3 Patten J W, McClanaham E D. J Appl Phys, 1972; 43: 4811 4 Thornton J A. J Vac Sci Technol, 1974; 11: 666 5 Bunshan R F. Deposition Technologies for Films and Coatings, New Jersey: Noyes, 1982: 17 [1] HUANG Ding, QIAO Yanxin, YANG Lanlan, WANG Jinlong, CHEN Minghui, ZHU Shenglong, WANG Fuhui. Effect of Shot Peening of Substrate Surface on Cyclic Oxidation Behavior of Sputtered Nanocrystalline Coating[J]. 金属学报, 2023, 59(5): 668-678. [2] CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong. Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property[J]. 金属学报, 2021, 57(4): 473-490. [3] LIU Yanmei, WANG Tiegang, GUO Yuyao, KE Peiling, MENG Deqiang, ZHANG Jifu. Design, Preparation and Properties of Ti-B-N Nanocomposite Coatings[J]. 金属学报, 2020, 56(11): 1521-1529. [4] Wentao LI,Zhenyu WANG,Dong ZHANG,Jianguo PAN,Peiling KE,Aiying WANG. Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing[J]. 金属学报, 2019, 55(5): 647-656. [5] Shasha YANG,Feng YANG,Minghui CHEN,Yunsong NIU,Shenglong ZHU,Fuhui WANG. Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering[J]. 金属学报, 2019, 55(3): 308-316. [6] Houpu WU,Xiubo TIAN,Xinyu ZHANG,Chunzhi GONG. Discharge Characteristics of Novel Dual-Pulse HiPIMS and Deposition of CrN Films with High Deposition Rate[J]. 金属学报, 2019, 55(3): 299-307. [7] Huiying SHI, Chao YANG, Bailing JIANG, Bei HUANG, Di WANG. Influences of Target Peak Current Density on the Microstructure and Mechanical Properties of TiN Films Deposited by Dual Pulsed Power Magnetron Sputtering[J]. 金属学报, 2018, 54(6): 927-934. [8] Baiyang LOU,Yuxing WANG. EFFECTS OF Mo CONTENT ON THE MICRO-STRUCTURE AND TRIBOLOGICAL PROPERTIES OF CrMoAlN FILMS[J]. 金属学报, 2016, 52(6): 727-733. [9] Xudong SUI,Guojian LI,Qiang WANG,Xuesi QIN,Xiangkui ZHOU,Kai WANG,Lijian ZUO. PREPARATION OF Ti1-xAlxN COATING IN CUTTING TITANIUM ALLOY AND ITS CUTTING PERFORMANCE[J]. 金属学报, 2016, 52(6): 741-746. [10] QI Dongli, LEI Hao, FAN Di, PEI Zhiliang, GONG Jun, SUN Chao. EFFECT OF Mo CONTENT ON THE MICROSTRUC-TURE AND PROPERTIES OF CrMoN COMPOSITE COATINGS[J]. 金属学报, 2015, 51(3): 371-377. [11] Chao YANG,Bailing JIANG,Lin FENG,Juan HAO. EFFECT OF DISCHARGE CHARACTERISTICS OF TARGET ON IONIZATION AND DEPOSITION OF DEPOSITED PARTICLES[J]. 金属学报, 2015, 51(12): 1523-1530. [12] Wenfang CUI,Dong CAO,Gaowu QIN. MICROSTRUCTURE AND WEAR RESISTANCE OF Ti/TiN MULTILAYER FILMS DEPOSITED BY MAGNETRON SPUTTERING[J]. 金属学报, 2015, 51(12): 1531-1537. [13] Yutian MA,Junbiao LIU,Rongling HUO,Li HAN,Geng NIU. RESEARCH ON THE PREPARATION AND PERFOR-MANCE OF TUNGSTEN-ALUMINUM TRANSMIS-SION TARGET FOR MICRO-COMPUTED TOMOGRAPHY BY MAGNETRONSPUTTERING[J]. 金属学报, 2015, 51(11): 1416-1424. [14] Yutian MA,Junbiao LIU,Rongling HUO,Li HAN,Geng NIU. RESEARCH ON THE PREPARATION AND PERFOR-MANCE OF TUNGSTEN-ALUMINUM TRANSMIS-SION TARGET FOR MICRO-COMPUTED TOMOGRAPHY BY MAGNETRONSPUTTERING[J]. 金属学报, 2015, 51(11): 1416-1424. [15] WANG Zhenyu, XU Sheng, ZHANG Dong, LIU Xincai, KE Peiling, WANG Aiying. INFLUENCE OF N2 FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD[J]. 金属学报, 2014, 50(5): 540-546. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed