Acta Metall Sin  1996, Vol. 32 Issue (7): 774-778    DOI:

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STUDY OF MULTILAYER INTERFACE ROUGHNESS BY LOW-ANGLE X-RAY DIFFRACTION

WANG Fengping;CUI Mingqi; WANG Peixuan; FANG Zhengzhi University; of Science and Technology Beijing; Beijing 100083 Institute of High Energy Physics; Chinese Academy of Sciences; Beijing 100039(Manuscript received 1995-10-04)

WANG Fengping;CUI Mingqi; WANG Peixuan; FANG Zhengzhi University; of Science and Technology Beijing; Beijing 100083 Institute of High Energy Physics; Chinese Academy of Sciences; Beijing 100039(Manuscript received 1995-10-04). STUDY OF MULTILAYER INTERFACE ROUGHNESS BY LOW-ANGLE X-RAY DIFFRACTION. Acta Metall Sin, 1996, 32(7): 774-778.

Abstract References Related Articles Recommended Metrics Download:  PDF(363KB)  Export:  BibTeX | EndNote (RIS)       Abstract  W/Si multilayer for soft X-ray optics was deposited by magnetron sputtering. The periodicity and interface roughness of the multilayer were studied by low-angle X-ray diffraction at a X-ray diffractometer, and analyzed with dynamical theory of X-ray diffraction. Good fitting between simulational and experimental curve has been obtained with a model that allows for interface asymmetry.Correspondent: WANG Fengping, Department of Material Physics, University of Science and Technology Beijing, Beijing 100083 Key words:  multilayer      low-angle X-ray diffraction      interface roughness      magnetron sputtering      Received:  18 July 1996      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y1996/V32/I7/774 1SpillerE,YounKB．SPIE,1993;2011:2882CatichaA．SPIE,1992;1740:813BarbeeJrTW,SPIE,1985;563:24姜晓明．中国科技大学博士学位论文,19895 BerningPH．PhysThinFilms,1963;1:696 UnderwoodJH,BarbeeJrTW．AIPConferenceProceedings,1981;75:1707BoercherDB．SPIE,1991;1547:478李云奇．真空镀膜技术与设备,19899 SpillerE．In:DhezP,WeisbuchCeds．Physics,FabricationandApplicationofMultilayeredStructures．NewYork:Plenum,1987:27 [1] HUANG Ding, QIAO Yanxin, YANG Lanlan, WANG Jinlong, CHEN Minghui, ZHU Shenglong, WANG Fuhui. Effect of Shot Peening of Substrate Surface on Cyclic Oxidation Behavior of Sputtered Nanocrystalline Coating[J]. 金属学报, 2023, 59(5): 668-678. [2] ZHANG Jinyu, QU Qimeng, WANG Yaqiang, WU Kai, LIU Gang, SUN Jun. Research Progress on Irradiation Effects and Mechanical Properties of Metal/High-Entropy Alloy Nanostructured Multilayers[J]. 金属学报, 2022, 58(11): 1371-1384. [3] DAI Jincai, MIN Xiaohua, ZHOU Kesong, YAO Kai, WANG Weiqiang. Coupling Effect of Pre-Strain Combined with Isothermal Ageing on Mechanical Properties in a Multilayered Ti-10Mo-1Fe/3Fe Alloy[J]. 金属学报, 2021, 57(6): 767-779. [4] CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong. Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property[J]. 金属学报, 2021, 57(4): 473-490. [5] LIU Yanmei, WANG Tiegang, GUO Yuyao, KE Peiling, MENG Deqiang, ZHANG Jifu. Design, Preparation and Properties of Ti-B-N Nanocomposite Coatings[J]. 金属学报, 2020, 56(11): 1521-1529. [6] Wentao LI,Zhenyu WANG,Dong ZHANG,Jianguo PAN,Peiling KE,Aiying WANG. Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing[J]. 金属学报, 2019, 55(5): 647-656. [7] Shasha YANG,Feng YANG,Minghui CHEN,Yunsong NIU,Shenglong ZHU,Fuhui WANG. Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering[J]. 金属学报, 2019, 55(3): 308-316. [8] Houpu WU,Xiubo TIAN,Xinyu ZHANG,Chunzhi GONG. Discharge Characteristics of Novel Dual-Pulse HiPIMS and Deposition of CrN Films with High Deposition Rate[J]. 金属学报, 2019, 55(3): 299-307. [9] Haifeng ZHANG, Haile YAN, Nan JIA, Jianfeng JIN, Xiang ZHAO. Exploring Plastic Deformation Mechanism of MultilayeredCu/Ti Composites by Using Molecular Dynamics Modeling[J]. 金属学报, 2018, 54(9): 1333-1342. [10] Huiying SHI, Chao YANG, Bailing JIANG, Bei HUANG, Di WANG. Influences of Target Peak Current Density on the Microstructure and Mechanical Properties of TiN Films Deposited by Dual Pulsed Power Magnetron Sputtering[J]. 金属学报, 2018, 54(6): 927-934. [11] Jin LIU,Yuanxia LAO,Yuan WANG. Effects of Cu on Microstructure and Mechanical Properties of AlN/TiN-Cu Nanocomposite Multilayers[J]. 金属学报, 2017, 53(4): 465-471. [12] Yao WANG,Xiaoying ZHU,Guimin LIU,Jun DU. Strain Rate Sensitivity of Cu/Ni and Cu/NbNanoscale Multilayers[J]. 金属学报, 2017, 53(2): 183-191. [13] Xudong SUI,Guojian LI,Qiang WANG,Xuesi QIN,Xiangkui ZHOU,Kai WANG,Lijian ZUO. PREPARATION OF Ti1-xAlxN COATING IN CUTTING TITANIUM ALLOY AND ITS CUTTING PERFORMANCE[J]. 金属学报, 2016, 52(6): 741-746. [14] Baiyang LOU,Yuxing WANG. EFFECTS OF Mo CONTENT ON THE MICRO-STRUCTURE AND TRIBOLOGICAL PROPERTIES OF CrMoAlN FILMS[J]. 金属学报, 2016, 52(6): 727-733. [15] Meijuan LI,Xiaolong LIU,Yuntao LIU,Mingyi ZHENG,Chen WANG,Dongfeng CHEN. TEXTURE EVOLUTION AND MECHANICAL PROPER-TIES OF Mg/Al MULTILAYERED COMPOSITE SHEETSPROCESSED BY ACCUMULATIVE ROLL BONDING[J]. 金属学报, 2016, 52(4): 463-472. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed