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Acta Metall Sin  1996, Vol. 32 Issue (12): 1270-1274    DOI:
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EFFECT OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF ION PLATING TiN FILMS
YU Li; LIU Jiwen;ZHAO Jie; DAI Shaoxia;JIN Zhujing;WANG Huijun(State Key Laboratory of Corroston and Protection;Institute of Corroston and Protection of Metals; Chinese Academy of Sciences;Shenyang;110015)( Metallurgical College; Mianjing Universily;Tianjin 300400 )(Manuscript received 1995-12-06; in revised form 1996-09-02)
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YU Li; LIU Jiwen;ZHAO Jie; DAI Shaoxia;JIN Zhujing;WANG Huijun(State Key Laboratory of Corroston and Protection;Institute of Corroston and Protection of Metals; Chinese Academy of Sciences;Shenyang;110015)( Metallurgical College; Mianjing Universily;Tianjin 300400 )(Manuscript received 1995-12-06; in revised form 1996-09-02). EFFECT OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF ION PLATING TiN FILMS. Acta Metall Sin, 1996, 32(12): 1270-1274.

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Abstract  The TiN films were deposited onto low carbon steel substrate materials by hollow cathode discharge ion plating instrument under different substrate temperatures (150,250, 350 and 450℃),and the microhardness and wear resistance were measured.The results show that the values of HV of TiN films slightly increase but the varies of wear resistance can be neglected with change of the substrate temperature. Meanwhile,the textures of tin films were analysis by X-ray diffraction and their morphologies were also observed by scanning electron microscope(SEM).
Key words:  TiN film      ion plating      substrate tempertature     
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