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Acta Metall Sin  1993, Vol. 29 Issue (11): 85-90    DOI:
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CRYSTALLIZATION KINETICS OF SPUTTERING Fe_(82)Si_6B_(12) AMORPHOUS ALLOY FILM
JIANG Honggang;TONG Huayu;DING Bingzhe;HU Zhuangqi;SONG Qihong;DONG Lin;ZHOU Qiang State Key Laboratory of RSA; Institute of Metal Research; Academia Sinica; Shenyang Liaoning Physical and Chemical Testing Centre; Shenyang
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JIANG Honggang;TONG Huayu;DING Bingzhe;HU Zhuangqi;SONG Qihong;DONG Lin;ZHOU Qiang State Key Laboratory of RSA; Institute of Metal Research; Academia Sinica; Shenyang Liaoning Physical and Chemical Testing Centre; Shenyang. CRYSTALLIZATION KINETICS OF SPUTTERING Fe_(82)Si_6B_(12) AMORPHOUS ALLOY FILM. Acta Metall Sin, 1993, 29(11): 85-90.

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Abstract  In situ observation under TEM was carried out on the crystallization of prima-ry crystalline α(Fe, Si) in the sputtering Fe_(82)Si_6B_12 amorphous alloy film. The growth ofa(Fe,Si) is of dendritic morphology along <110> orientation. The nucleation of primarycrystalline a(Fe,Si) may be transient homogeneous, in circular or polygonal shape and to berapidly growing into dendrites. The growth of the α(Fe,Si) dendrites is controlled bylong-range diffusion of B atoms in the amorphous alloy. The self-diffusion coefficient of Batom in the sputtering Fe_(82)Si_6B_(12) amorphous alloy film together with the Arrhenius relationbetween diffusion coefficient and annealing temperature were obtained on the basis of kineticanalysis of its growing process.
Key words:  Fe_(82)Si_6B_(12) amorphous alloy      film      crystallization      diffusion     
Received:  18 November 1993     
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