|
|
KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA |
ZHU Lianxi;ZOU Siwei Chengdu University of Science and Technology Department of Environmental Science and Engineering;Chengdu University of Science and Technology;Chengdu 610065 |
|
Cite this article:
ZHU Lianxi;ZOU Siwei Chengdu University of Science and Technology Department of Environmental Science and Engineering;Chengdu University of Science and Technology;Chengdu 610065. KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA. Acta Metall Sin, 1990, 26(1): 135-140.
|
Abstract The reaction kinetics model for the synthesis of ultrafine TiN pow-der from vapour phase system TiCl_4-NH_3-H_2-N_2 in the high frequency plasma reac-tor was proposed as follows: (-r_A)=-1/v(dn_(TiCl_4)/dt)=0.852e~(-63.2/RT)P_(TiCl_4)The majority of factors influenced upon the reaction be were analysed, so as toprovide the theoretical basis for improving quality of TiN powder and for opti-mizing the design of plasma reactor.
|
Received: 18 January 1990
|
1 福原幹夫,永井弘,三谷裕康.日本金属学会志,1978;42:588 2 Zhu Lianxi (朱联锡), Jin Peng (金鹏), Ran Junguo (冉均国). Proc Int Conf on Plasma Science and Technology, Beijing: Science Press, 1986: 329 3 Zhu Lianxi (朱联锡), Jin Peng (金鹏), Xiao Xian-Zhi (肖显志). Proc 8th Int Symp. on Plasma Chemistry, Tokyo, 1987: 2087 4 Saeki Y, Matsuzaki R, Yajima A, Akiyama M. Bull Chem Soc Jpn, 1982; 55: 3193 5 #12i |
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
|
Shared |
|
|
|
|
|
Discussed |
|
|
|
|