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基材温度对离子镀TiN膜性能的影响 |
于力;刘技文;赵杰;戴少侠;金柱京;王慧君 |
中国科学院金属腐蚀与防护研究所腐蚀与防护国家重点实验室;天津大学冶金分校 |
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EFFECT OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF ION PLATING TiN FILMS |
YU Li; LIU Jiwen;ZHAO Jie; DAI Shaoxia;JIN Zhujing;WANG Huijun(State Key Laboratory of Corroston and Protection;Institute of Corroston and Protection of Metals; Chinese Academy of Sciences;Shenyang;110015)( Metallurgical College; Mianjing Universily;Tianjin 300400 )(Manuscript received 1995-12-06; in revised form 1996-09-02) |
引用本文:
于力;刘技文;赵杰;戴少侠;金柱京;王慧君. 基材温度对离子镀TiN膜性能的影响[J]. 金属学报, 1996, 32(12): 1270-1274.
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EFFECT OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF ION PLATING TiN FILMS[J]. Acta Metall Sin, 1996, 32(12): 1270-1274.
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