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电弧离子镀沉积磁性薄膜的研究 |
常正凯, 肖金泉, 陈育秋, 刘山川, 宫骏, 孙超 |
中国科学院金属研究所, 沈阳 110016 |
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STUDY ON DEPOSITION OF MAGNETIC FILMS USING ARC ION PLATING |
CHANG Zhengkai, XIAO Jinquan, CHEN Yuqiu, LIU Shanchuan, GONG Jun, SUN Chao |
Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016 |
引用本文:
常正凯, 肖金泉, 陈育秋, 刘山川, 宫骏, 孙超. 电弧离子镀沉积磁性薄膜的研究[J]. 金属学报, 2012, 48(5): 547-554.
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STUDY ON DEPOSITION OF MAGNETIC FILMS USING ARC ION PLATING[J]. Acta Metall Sin, 2012, 48(5): 547-554.
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