Mo含量对CrMoN复合涂层的组织结构和性能的影响

doi:10.11900/0412.1961.2014.00549

金属学报

2015, Vol. 51

Issue (3): 371-377 DOI: 10.11900/0412.1961.2014.00549

论文

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Mo含量对CrMoN复合涂层的组织结构和性能的影响

齐东丽, 雷浩, 范迪, 裴志亮, 宫骏, 孙超

中国科学院金属研究所, 沈阳 110016

EFFECT OF Mo CONTENT ON THE MICROSTRUC-TURE AND PROPERTIES OF CrMoN COMPOSITE COATINGS

QI Dongli, LEI Hao, FAN Di, PEI Zhiliang, GONG Jun, SUN Chao

Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016

全文: PDF(4694 KB) HTML

摘要: 采用直流反应磁控溅射技术在M2高速钢基片上制备了不同Mo含量的CrMoN复合涂层, 研究了Mo含量的变化对CrMoN复合涂层成分、相结构、化学价态、截面形貌、显微硬度和摩擦性能等的影响．结果表明, 随着Mo含量的增加, CrMoN复合涂层的相结构先转变为以fcc-CrN相为基础的(Cr, Mo)N置换式固溶体, 后转变为以fcc-g-Mo₂N相为主的混合相, 当Mo含量为69.3% (原子分数)时, 伴有少量的bcc-Mo相生成; CrMoN复合涂层的显微硬度先增加后降低, 在Mo含量为45.4%时具有最高值; 当Mo含量大于45.4%时, 在与对磨副摩擦过程中会生成大量的MoO₃相, 降低了摩擦系数和磨损率.

关键词 ： CrMoN复合涂层, 磁控溅射, 显微硬度, 摩擦系数

Abstract：Ceramic coatings are usually used as protective coatings to improve performance and durability of tools and components now. Compared with conventional TiN based hard coating, CrN based coating like Cr-X-N (X=Ti, Al, Si, C, B, Ta, Nb, Ni) is a more interesting choice because of low friction coefficient, superior oxidation resistance and excellent corrosion resistance under severe environment conditions. The CrMoN is among these coatings and attractive since self-lubricating phase MoO₃may be formed in tribological process. However the effect of Mo content on structure and tribological properties of CrMoN coatings is not still clear. In the present study, CrMoN composite coatings with different Mo content were deposited on M2 high speed steel (HSS) substrates by DC reactive magnetron sputtering. The effect of Mo content on the microstructure and properties was investigated systematically, including the chemical composition, phase structure, chemical valence, cross-section morphologies, microhardness and tribological properties. The results showed that the phase transformation of the as-deposited coatings occurred with the increase of Mo content. The phase structure changed to (Cr, Mo)N substitutional solid solution based on CrN-type firstly, and then to mixed phase with g-Mo₂N as main phase, and a small amount of elemental bcc-Mo phase appeared when the Mo content is 69.3%. The microhardness of the CrMoN composite coatings always increased until the highest hardness when the Mo content reached to 45.4%, and then decreased; a relatively low friction coefficient was obtained compared with that of the CrN coating when more than 45.4%Mo content was doped. The reason is that the more MoO₃ lubricant phase could be formed in tribological process.

Key words： CrMoN composite coating magnetron sputtering microhardness friction coefficient

ZTFLH:

TG172

基金资助:*国家重点基础研究发展计划项目2012CB625100, 国家自然科学基金项目51171197, 以及辽宁省自然科学基金项目2013020132和2013010442-401资助

Corresponding author: Correspondent: GONG Jun, professor, Tel: (024)83978232, E-mail: jgong@imr.ac.cn E-mail: jgong@imr.ac.cn

作者简介: 齐东丽, 男, 1978年生, 博士生

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引用本文:

齐东丽, 雷浩, 范迪, 裴志亮, 宫骏, 孙超. Mo含量对CrMoN复合涂层的组织结构和性能的影响[J]. 金属学报, 2015, 51(3): 371-377.
QI Dongli, LEI Hao, FAN Di, PEI Zhiliang, GONG Jun, SUN Chao. EFFECT OF Mo CONTENT ON THE MICROSTRUC-TURE AND PROPERTIES OF CrMoN COMPOSITE COATINGS. Acta Metall Sin, 2015, 51(3): 371-377.

链接本文:

https://www.ams.org.cn/CN/10.11900/0412.1961.2014.00549 或 https://www.ams.org.cn/CN/Y2015/V51/I3/371

Images/0895-3988-371/imgDC5B 磁控溅射装置示意图

Images/0895-3988-371/grpDCC9 不同Mo含量CrMoN复合涂层的XRD谱

Images/0895-3988-371/grpDD38 fcc结构晶格常数随Mo含量的变化

Images/0895-3988-371/imgDD58 不同Mo含量CrMoN复合涂层的截面SEM像

Images/0895-3988-371/grpE026 CrMoN复合涂层No.2和No.6的XPS谱

Images/0895-3988-371/grpE085 不同Mo含量CrMoN复合涂层的摩擦系数和磨损率

Images/0895-3988-371/grpE096 不同Mo含量CrMoN复合涂层的磨痕表面轮廓

Images/0895-3988-371/imgE0B6 不同Mo含量CrMoN复合涂层的磨痕表面SEM像

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