Ion beam Sputtering Profiling in combination with SIMS technique was em-ployed to investigate the Al diffusion in Fe_(78)Si_9B_(13) amorphous alloy. Between 320℃ and 380℃,the diffusion coefficients vary from 2.43×10~(-22) to 2.01×10~(-21) m~2s~(-1), and an Arrhenius rela-tionship was established as: D_o = 2.02×10~(-12) exp (--1.17 / kT)