INVESTIGATION OF THE MECHANISM RESULTING IN THE NONUNIFORM DEPOSITION OF DIAMOND FILM

Acta Metall Sin

1997, Vol. 33

Issue (6): 650-654 DOI:

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INVESTIGATION OF THE MECHANISM RESULTING IN THE NONUNIFORM DEPOSITION OF DIAMOND FILM

HUO Xiao; REN Jialie; Lu Anli (Tsinghua Universitv; Beijing 100084)

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HUO Xiao; REN Jialie; Lu Anli (Tsinghua Universitv; Beijing 100084). INVESTIGATION OF THE MECHANISM RESULTING IN THE NONUNIFORM DEPOSITION OF DIAMOND FILM. Acta Metall Sin, 1997, 33(6): 650-654.

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Abstract Based on the experimental results of depositing diamond film by MPCVDmethod, the effect of the characteristics of microwave induced plasma on the process of diamond deposition is thoroughly analysed. A new mechanism causing nonuniform diamonddeposition had been put forward, which considers the main factor to be the nonuniform distribution of supersaturated atomic hydrogen resulted from the nonuniform distribution ofelectrons in microwave induced plasma.

Key words: diamond film nonuniform deposition mechanism

Received: 18 June 1997

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1997/V33/I6/650

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