MICROSTRUCTURE AND MECHANICAL PROPERTIES OF DLC FILMS DOPED WITH HIGH CRYSTALLINITY CrN NANOPARTICLES

doi:10.3724/SP.J.1037.2011.00512

Acta Metall Sin

2012, Vol. 48

Issue (3): 283-288 DOI: 10.3724/SP.J.1037.2011.00512

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MICROSTRUCTURE AND MECHANICAL PROPERTIES OF DLC FILMS DOPED WITH HIGH CRYSTALLINITY CrN NANOPARTICLES

WU Zhongzhen, TIAN Xiubo, CHENG Sida, GONG Chunzhi, YANG Shiqin

State Key Lab of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001

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WU Zhongzhen TIAN Xiubo CHENG Sida GONG Chunzhi YANG Shiqin. MICROSTRUCTURE AND MECHANICAL PROPERTIES OF DLC FILMS DOPED WITH HIGH CRYSTALLINITY CrN NANOPARTICLES. Acta Metall Sin, 2012, 48(3): 283-288.

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Abstract DLC films with dispersed high crystallinity CrN nanoparticles were prepared by high power pulsed magnetron discharge plasma ion implantation & deposition (HPPMS-PIID) combined with DC magnetron sputtering (DCMS). The surface morphology, structure and properties of CrN--DLC films with the different currents of C target were studied. The results show that the C content increases as the raise of the current of the C target and clear characteristics of DLC films are found at a higher C content. CrN doped in DLC exists as nanoparticles with highly 200 preferred orientation, and the smallest size of the CrN grains is 42.39 nm. The C1s peak primarily consists of the three peaks that correspond to C-sp², C-sp³ and CN-sp³, and the ratio of total sp³ to sp² is 44.8%. Excellent adhesion between film and substrate with critical load of 66.8 N and high nanohardness up to 24.3 GPa are achieved due to highly energetic ion bombardment and implantation in HPPMS-PIID.

Key words: high power pulsed magnetron discharge DLC film CrN crystallinity mechanical properties

Received: 08 August 2011

ZTFLH:

TG174.444

Fund:

Supported by National Natural Science Foundation of China (Nos.10975041 and 10905013)

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https://www.ams.org.cn/EN/10.3724/SP.J.1037.2011.00512 OR https://www.ams.org.cn/EN/Y2012/V48/I3/283

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