SIZE EFFECTS ON THE DEFORMATION AND DAMAGEOF Cu-BASED METALLIC NANOLAYEREDMICRO-PILLARS

doi:10.11900/0412.1961.2016.00315

Acta Metall Sin

2016, Vol. 52

Issue (10): 1249-1258 DOI: 10.11900/0412.1961.2016.00315

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SIZE EFFECTS ON THE DEFORMATION AND DAMAGEOF Cu-BASED METALLIC NANOLAYEREDMICRO-PILLARS

Jun SUN(

),Jinyu ZHANG,Kai WU,Gang LIU

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China

Cite this article:

Jun SUN, Jinyu ZHANG, Kai WU, Gang LIU. SIZE EFFECTS ON THE DEFORMATION AND DAMAGEOF Cu-BASED METALLIC NANOLAYEREDMICRO-PILLARS. Acta Metall Sin, 2016, 52(10): 1249-1258.

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Abstract

The nanostructured metallic multilayers (NMMs) are widely used as essential components of high performance microelectronics and interconnect structures. The deformation and damage of NMMs is the essential factor leading to the structural failure of these systems. In this paper, based on these experimental results achieved by the authors, as well as the state-of-the-art and progress at home and abroad in the plastic deformation behavior of micropillars of Cu-based NMMs, the correlation of microstructure-size constraint-mechanical performance in the Cu-based nanolayered micropillars is illustrated. The universality of their deformation modes and internal damage mechanisms are revealed, and the work hardening /softening behaviors of two types of nanolaminates, including crystalline/crystalline and crystalline/amorphous NMMs, are summarized. Finally, a brief prospect on the studies of NMMs in future is suggested.

Key words: nanostructured metallic multilayer micro-pillar plastic deformation fracture and damage size effect

Received: 19 July 2016

ZTFLH:

Fund: Supported by National Basic Research Program of China (No.2010CB631003), National Natural Science Foundation of China (Nos.51571157, 51321003, 51322104 and 51201123), Program of Introducing Talents of Discipline to Universities of China (No.B06025) and Natural Science Basic Research Plan in Shaanxi Province of China (No.2015JM5158)

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	Jun SUN
	Jinyu ZHANG
	Kai WU
	Gang LIU

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https://www.ams.org.cn/EN/10.11900/0412.1961.2016.00315 OR https://www.ams.org.cn/EN/Y2016/V52/I10/1249

Fig.1 Relationship between hardness (H) and the layer thickness (h) for different crystalline/crystalline (fcc/bcc, fcc/fcc, fcc/hcp) and crystalline/amorphous systems^[33] (H-P—Hall-Petch, CLS—confined layer slip, IBS—interface barrier strength)

Fig.2 Relationship between maximum strength (σ_max) and h (a), and diameter ? (b) for different crystalline/crystalline and crystalline/amorphous nanolayered micropillars

Fig.3 Strain rate sensitivity exponent m as a function of plastic strain ε_p for Cu nanostructures, including Cu NTs, Cu NCs, nanotwinned Cu with fine and coarse nano-twins (a), and Cu-based nanolayered pillars, including Cu/X (X=Cr, Zr) NTNLs, Cu/X NCNLs, Cu/Cu-Zr C/ANLs and Cu/Ni micropillars (b) ^[49] (NTs—nano-twinned multicrystalline micropillars, NCs—nanocrystalline multicrystalline micropillars, NTNLs—nano-twinned nanolayered micropillars, NCNLs—nanocrystalline nanolayered micropillars, C/ANLs—crystalline/amorphous nanolayered micropillars)

Fig.4 Strain hardening rate θ as a function of layer/film thickness h for Cu single and multilayers^[38,39,57] (a) and the strain hardening exponent n as a function of layer thickness h for multilayers and of grain size d for Cu^[58-60] (b) (NLPs—nanolayered micropillars)

Fig.5 Deformation mode- map for crystalline/crystalline nanolayered micropillars (Experimental observations are summarized with data symbols: shear localization (half square) in R_I, shear+extrusion deformation (half circle) in R_II, homogeneous uniform extrusion and barreling deformation (half diamond) in R_III; β—aspect ratio)

Fig.6 Deformation mode maps for Cu/Zr nanolayered micropillars with interfacial mismatch δ=11.2% (Four regimes, i.e., R_I: localized shearing, R_II: shear bands+codeformation, R_III: shear bands+extrusion, and R_IV: extrusion+localized debonding, are included in the damage mode-map^[38])

Fig.7 Deformation mode-map for Cu/Cu- Zr crystalline/amorphous nanolayered micropillars (Regime I, R_I, and regime II, R_II, represent shear band deformation and homogeneous- like deformation, respectively).

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