磁控溅射沉积Ti/TiN多层膜的组织特征及耐磨损性能<sup>*</sup>

doi:10.11900/0412.1961.2015.00115

金属学报

2015, Vol. 51

Issue (12): 1531-1537 DOI: 10.11900/0412.1961.2015.00115

本期目录 | 过刊浏览

磁控溅射沉积Ti/TiN多层膜的组织特征及耐磨损性能^*

崔文芳(

),曹栋,秦高梧

东北大学材料各向异性与织构(教育部)重点实验室, 沈阳 110819

MICROSTRUCTURE AND WEAR RESISTANCE OF Ti/TiN MULTILAYER FILMS DEPOSITED BY MAGNETRON SPUTTERING

Wenfang CUI(

),Dong CAO,Gaowu QIN

Key Laboratory for Anisotropy and Texture of Materials (Ministry of Education), Northeastern University, Shenyang 110819

引用本文:

崔文芳,曹栋,秦高梧. 磁控溅射沉积Ti/TiN多层膜的组织特征及耐磨损性能^*[J]. 金属学报, 2015, 51(12): 1531-1537.
Wenfang CUI, Dong CAO, Gaowu QIN. MICROSTRUCTURE AND WEAR RESISTANCE OF Ti/TiN MULTILAYER FILMS DEPOSITED BY MAGNETRON SPUTTERING[J]. Acta Metall Sin, 2015, 51(12): 1531-1537.

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摘要:

采用固定Ti间隔层厚度, 改变TiN层厚度的方法在Ti6Al4V合金表面制备Ti/TiN多层膜, 研究循环周期对Ti/TiN多层膜的相结构、形貌特征、结合力、硬度和在模拟人体液中摩擦磨损行为的影响. 结果表明, 与TiN单层膜相比, Ti/TiN多层膜中TiN由(111)择优取向转变为(200)择优取向, 多层膜表面粗糙度、硬度和结合力得到显著改善. 增加循环周期降低Ti/TiN多层膜表面硬度, 但有利于提高结合强度. 多层Ti/TiN膜的强韧化主要来自于TiN层的细晶强化和界面共格强化效应. 当TiN与Ti层厚度比为30, 循环周期为3时, Ti/TiN多层膜具有良好的综合性能, 硬度为15.8 GPa, 结合强度为50 N, 摩擦系数为0.35, 体积磨损率低于4.0×10^-⁶mm³/ (Nm).

关键词 ： Ti/TiN多层膜, 磁控溅射, 循环周期, 组织结构, 磨损性能

Abstract：

Ti and Ti alloys with low elastic modulus, good mechanical properties and biocompatibility have been widely used for dental implant, arthroplasty and internal fixation material in spinal fusion. But the poor wear resistance of Ti and Ti alloys generally results in the aseptic loosening of the implants. TiN coating has good chemical stability and biocompatibility in physiological environment and plays an important role in improving the corrosion wear performance of Ti and Ti alloys. However, the adhesion strength of TiN film prepared by traditional technologies does not meet the requirement of long service life of the implants. In this work, the alternating Ti/TiN multilayer films were prepared by magnetron sputtering technology with constant Ti layer thickness and varying TiN layer thickness. The cycling periods were designed to be 1, 3, 6, 9, and 12. The total depositing time was 185 min. The main aims of this investigation were to clarify the effects of the cycling periods on the surface morphologies, hardness, bonding strength, friction and abrasion behavior in simulated body fluid of Ti/TiN multilayer films. The results show that the total thickness of Ti/TiN multilayer film is in the range of 5.5~6.0 mm. (111)_TiN preferred orientation is found in TiN monolayer film, and (002)_TiN preferred orientation is found in Ti/TiN multilayer films. In comparison with TiN monolayer film, Ti/TiN multilayer films exhibit lower surface roughness, higher hardness, bonding strength and wear resistance. The strengthening and toughening of Ti/TiN multilayer films result from the refinement of columnar crystals and interface coherent effect between Ti and TiN layer. The increase of cycling period decreases the hardness of Ti/TiN multilayer film, but is beneficial to enhancing the bonding strength to the substrate. The rupture and exfoliation of thin TiN layer at outer surface promote the abrasive wear and oxidation wear. At the condition of layer thickness ratio 30 for TiN and Ti and 3 cyc, the Ti/TiN multilayer film has good combined mechanical properties. Hardness is 15.8 GPa, adhesion strength is 50 N, coefficient of friction is 0.35, and volume wear rate in Hank's solution is less than 4.0×10^-⁶mm³/ (Nm).

Key words： Ti/TiN multilayer film magnetron sputtering cycling period microstructure wear resistance

基金资助:* 教育部科学技术研究重大资助项目313014

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https://www.ams.org.cn/CN/10.11900/0412.1961.2015.00115 或 https://www.ams.org.cn/CN/Y2015/V51/I12/1531

图1 TiN单层膜和不同循环周期下Ti/TiN多层膜的XRD谱

图2 TiN单层膜和循环周期为3 cyc的Ti/TiN多层膜中TiN柱状晶SEM像

图3 TiN单层膜和Ti/TiN多层膜表面及截面的FE-SEM像

表1 TiN单层膜和不同周期下Ti/TiN多层膜的Ti和TiN层的沉积时间和厚度

图4 TiN单层膜和Ti/TiN多层膜在Hank's溶液中的摩擦系数随时间的变化

表2 不同周期下Ti/TiN多层膜的显微硬度和结合力

图5 TiN单层膜和Ti/TiN多层膜在Hank's溶液中磨损后的磨痕形貌

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