各向异性稀土永磁薄膜的磁黏滞性

doi:10.11900/0412.1961.2017.00211

金属学报

2018, Vol. 54

Issue (3): 457-462 DOI: 10.11900/0412.1961.2017.00211

本期目录 | 过刊浏览

各向异性稀土永磁薄膜的磁黏滞性

孙亚超, 朱明刚(

), 韩瑞, 石晓宁, 俞能君, 宋利伟, 李卫

钢铁研究总院功能材料研究所北京 100081

Magnetic Viscosity of Anisotropic Rare Earth Permanent Films

Yachao SUN, Minggang ZHU(

), Rui HAN, Xiaoning SHI, Nengjun YU, Liwei SONG, Wei LI

Division of Functional Material, Central Iron & Steel Research Institute, Beijing 100081, China;

引用本文:

孙亚超, 朱明刚, 韩瑞, 石晓宁, 俞能君, 宋利伟, 李卫. 各向异性稀土永磁薄膜的磁黏滞性[J]. 金属学报, 2018, 54(3): 457-462.
Yachao SUN, Minggang ZHU, Rui HAN, Xiaoning SHI, Nengjun YU, Liwei SONG, Wei LI. Magnetic Viscosity of Anisotropic Rare Earth Permanent Films[J]. Acta Metall Sin, 2018, 54(3): 457-462.

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摘要:

利用直流磁控溅射技术在Si基底上制备了NdFeB、CeFeB和NdFeB/CeFeB薄膜。XRD和磁滞回线结果表明,所制备的薄膜样品均具有良好的c轴取向,其中NdFeB单层薄膜垂直于薄膜表面方向的室温矫顽力 $H c ⊥$ 达到1377.4 kA/m。研究了3种不同薄膜样品的磁黏滞系数S随温度(5~300 K) 的变化趋势,发现在低温(5 K)条件下,3种薄膜的S值非常接近,且都小于1,这是由于低温时薄膜晶格内的热起伏已经不足以使畴壁跃过位垒达到能量更小的位置。通过研究温度和外场对3种薄膜磁黏滞性的影响,发现NdFeB/CeFeB薄膜的磁黏滞系数更接近于CeFeB单层薄膜,且远小于NdFeB薄膜,说明通过双硬磁复合能够有效降低薄膜磁化强度对时间的依赖性,提高其时间稳定性。

关键词 ：永磁薄膜, 磁性能, 磁黏滞

Abstract：

Rare earth permanent thin films are useful for magnetic microdevices such as micromotors, since its excellent magnetic properties are able to raise the performance of the devices. In order to judge the reliability of permanent magnet materials, it is quite theoretical and practical to study the time dependence behavior of magnetization, that is, magnetic viscosity or magnetic after-effect. In this work, NdFeB, CeFeB and NdFeB/CeFeB films were fabricated on the Si substrates by direct current (DC) magnetron sputtering. A Ta underlayer of 50 nm and a coverlayer of 40 nm were sputtered at room temperature to align the easy axis of the RE₂Fe₁₄B grains perpendicular to the film plane and to prevent oxidation of the magnetic films, respectively. NdFeB and CeFeB magnetic films were deposited at 903 and 883 K, respectively, and submitted to an in-situ rapid thermal annealing at 948 K for 30 min. The microstructure and magnetic properties of the films were characterized by XRD and physical property measurement system (PPMS). The results indicate that the films show excellent perpendicular anisotropy. A coercivity $H c ⊥$ of 1377.4 kA/m is obtained for NdFeB monolayer film at room temperature. The magnetic viscosity coefficient (S) of the films was studied over a range of temperatures (5~300 K). It is found that the values of S for all films are less than 1, and are quite similar at low temperature (5 K). Both weakened thermal agitation and strengthened anisotropy energy barriers are supposed to decrease transition frequency (f) and prolong relaxation time (τ) at low temperature, which lead to S decreasing. The magnetic viscosity of NdFeB/CeFeB thin film is as similar as that of the CeFeB monolayer thin film, and both are much smaller than that of the NdFeB film. It is shown that the dual-hard magnetic layer structure can effectively reduce the viscosity coefficient and improve the time stability of the NdFeB/CeFeB thin film. Furthermore, the temperature dependence of the initial decay rates (dM/dt) from 0 s to 10 s was discussed. The initial magnetic decay of the film demonstrates a similar temperature behavior as the magnetic viscosity coefficient S.

Key words： permanent thin film magnetic property magnetic viscosity

收稿日期: 2017-06-02

基金资助:资助项目国家重点基础研究发展计划项目No.2014CB643701和国家自然科学基金面上项目No.51571064

作者简介:

作者简介孙亚超,男,1988年生,博士

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https://www.ams.org.cn/CN/10.11900/0412.1961.2017.00211 或 https://www.ams.org.cn/CN/Y2018/V54/I3/457

图1 室温下样品垂直(⊥)和平行(//)于膜面方向的磁滞回线

图2 NdFeB、CeFeB和NdFB/CeFeB薄膜的XRD谱

图3 NdFeB、CeFeB和NdFeB/CeFeB薄膜矫顽力Hc随温度变化曲线

图4 NdFeB/CeFeB薄膜的磁化强度M/M0在外场H0 (H0=Hc)作用下随时间t和时间对数ln(t+t0)的变化曲线

图5 磁性薄膜的磁粘滞系数S随温度变化关系

图6 磁性薄膜起始时间段(0~10 s)磁化强度变化率dM/dt随温度的变化关系

图7 室温下NdFeB、CeFeB和NdFeB/CeFeB薄膜的S随外场的变化关系

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