2007, Vol. 43

Issue (6): 603-606 DOI:

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. . Acta Metall Sin, 2007, 43(6): 603-606 .

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Abstract Ni/Al nanomutlialyers with different modulated periods were prepared using multi-target magnetron sputtering method. The microstructure of nanomultialyers was studied by X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). The continuous stiffness mode (CSM) was employed to measure the effect of loading depth on the determination of hardness of thin films by means of nanoindentation. The results reveal that crystalline was strengthened with the increasing modulated period, L. And the superhardness phenomenon was observed for Ni/Al multilayers. Interestingly, for the multilayer with L more than 30 nm, depth-dependent hardness increased with the enhanced loading depth. However, the highest-depth hardness shows the lowest value for the Ni/Al multilayer with modulated period less than 30 nm. This tendency indicates the depth-sensing hardness for nanomultilayer by nanoindentation and this result is attributed to the competitive effects of modulated period and grain boundary.

Key words: multilayer hardness loading depth modulated period grain boundary

Received: 10 October 2006

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