Acta Metall Sin  2006, Vol. 42 Issue (9): 993-997     DOI:

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SUPERHARD nc-TiN/nc-Cu NANOCOMPOSITE FILM SYNTHESIZED BY MAGNETRON SPUTTERING WITH LOW ENERGY ION FLUX IRRADIATION

Li Zhuguo;Yu Hailiang; Wu Yixiong;MIYAKE　Shoji

上海交通大学材料学院

Li Zhuguo; Yu Hailiang; Wu Yixiong; MIYAKE　Shoji. SUPERHARD nc-TiN/nc-Cu NANOCOMPOSITE FILM SYNTHESIZED BY MAGNETRON SPUTTERING WITH LOW ENERGY ION FLUX IRRADIATION. Acta Metall Sin, 2006, 42(9): 993-997 .

Abstract References Related Articles Recommended Metrics Download:  PDF(214KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Ti-Cu-N films containing approximately 0—10.0% Cu (atomic fraction) were synthesized by inductively coupled plasma assisted magnetron sputtering with two elemental targets. The effects of Cu content on film hardness and microstructure have been investigated. The addition of a small amount of Cu significantly enhanced film hardness. The Ti-Cu-N film containing 2.0%Cu has a superhard trait, with a hardness HV value of 42, which is nearly two times of that of pure TiN film. The Superhard Ti-Cu-N film was characterized as a nanocomposite structure, consisting of nanocolumns of TiN crystallites with nanocrystal Cu inside the column boundaries. The hardness enhancement was attributed to nanocomposite effect. Key words:  magnetron sputtering      ion irradiation      nanocomposite film      hardness       Received:  29 June 2005      ZTFLH:  TB383   Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors Li Zhuguo Yu Hailiang Wu Yixiong MIYAKE　Shoji URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2006/V42/I9/993 [1]Li S Z,Shi Y L,Peng H R.Plasma Chem Plasma Process,1992;12:287 [2]Vep(?)ek S,Reiprich S.Thin Solid Films,1995;268:64 [3]Vep(?)ek S,Reiprich S,Li S Z.Appl Phys Lett,1995;66:2640 [41 Vep(?)ek S.Thin Solid Films,1998;317:449 [5]Vep(?)ek S,Niederhofer A,Moto K,Bolom T,M(?)nnling H D,Neslásdek P,Dollinger G,Bergmaier A.Surf Coat Technol,2002;133-134:152 [6]Vep(?)ek S,Argon A S.J Vac Sci Technol,2002;20B:650 [7]Musil J,Zeman P,Hrub H,Mayrhofer P H.Surf Coat Technol,1999;120-121:179 [8]Zemen P,(?)erstv R,Mayrhofer P H,Mitterer C,Musil J.Mater Sci Eng,2000;A289:189 [9]Musil J,Karvánková,Kasl J.Surf Coat Technol,2000;139:101 [10]Musil J,Hrub H,Zeman P,Zeman H,(?)erstv R,Mayrhofer P H,Mitterer C.Surf Coat Technol,2001;142-144:603 [11]Klug H P,Alexander L E.X-Ray Diffraction Procedures.New York:Wiley,1974:661 [12]Li Z G,Miyake S,Kumagai M,Saito H,Muramatsu Y.Surf Coat Technol,2004;183:62 [13]Greene J E,Sundgren J E,Hultman L,Petrov L,Bergstrom D B.Appl Phys Lett,1995;67:2928 [14]Musil J,Vl(?)ek J,Zeman P,Setsuhara Y,Miyake S,Konuma S,Kumagai M,Mitter C.Jpn J Appl Phys,2002;41:6529 [15]Karlsson L,Hultman L,Johansson M P,Sundgren J E,Ljungcrantz H.Surf Coat Technol,2000;126:1 [16]Myung H S,Lee H M,Shaginyan L R,Han J G.Surf Coat Technol,2000;163-164:591 [17]Oh S T,Sekino T,Niihara K.J Eur Ceram Soc,1998;18:31 [18]Kim B S,Lee J S,Sekino T,Choa Y H,Niihara K.Scr Mater,2001; 44:2121 [19]Sekino T,Niihara K.Nanostruct Mater,1995;6:663 [20]Luo Q,Rainforth W M,M(?)nz W D Wear,1999;225-229:74 [21]Kingergy W D,Bowen H K,Uhlmann D R.Introduction to Ceramics.New York:John Wiley and Sons,1976:765 [1] HUANG Ding, QIAO Yanxin, YANG Lanlan, WANG Jinlong, CHEN Minghui, ZHU Shenglong, WANG Fuhui. 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