EFFECT OF CARBON CONTENT INSUBSTRATE ON CVD TiN COATING

Acta Metall Sin

1991, Vol. 27

Issue (6): 122-125 DOI:

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EFFECT OF CARBON CONTENT INSUBSTRATE ON CVD TiN COATING

CHEN Erbao East China Institute of Metallurgy; Maanshan; Anhui

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CHEN Erbao East China Institute of Metallurgy; Maanshan; Anhui. EFFECT OF CARBON CONTENT INSUBSTRATE ON CVD TiN COATING. Acta Metall Sin, 1991, 27(6): 122-125.

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Abstract Effect of carbon content in substrate, made of 7 steels separately, on thel chemica vapour deposition of TiN has been investigated. The increment of deposition rate is linearly related to the increase of carbon conient in own substrate. The α-Fe peak, besides TiN, is revealed in X-ray diffraction pattern of the TiN coating.The (220) preferred growth of TiN deposited on Cr12MoV steel substrate increases with the increase of depositing temperature. Only Ti energy spectrum is found from the bright region at coating surface and the interior, while both Ti and Fe energy spectra from dark region.

Key words: TiN chemical vapour deposition coating

Received: 18 June 1991

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1991/V27/I6/122

1 陈二保,郭万华.华东冶金学院学报,1987;4(4) :36
2 Kim M S, Chun J S. Proc Eur Conf CVD, 4th, 1983: 517--303

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