Aluminum-based silicon carbide (SiC/Al) composites are widely used in the field of precision optics by virtue of their high specific modulus, high specific strength, and excellent dimensional stability. The dimensional stability of these composites is primarily influenced by macroscopic and microscopic residual stresses induced during the heat treatment process. This study employed neutron diffraction and finite element method (FEM) to investigate the impact of cryogenic cycle treatment on both macroscopic and microscopic residual stresses within the 35%SiC/6092Al composite material in the annealed state. The results of this study will clarify the methods and effects of reducing the residual stress and improving the dimensional stability of precision optical parts. The study focused on the influencing factors such as the number of cryogenic cycles, sample size, reinforcement particle size, and temperature difference of cryogenic cycles. The results show that the deep cryogenic cycles can remarkably reduce the internal stress of SiC/Al composites in the annealed state; as the number of cryogenic cycles increases, the internal stress reduction effect of a single cycle weakens. The cryogenic cycles primarily induce plastic strain in the matrix around particles, thereby influencing the internal stress between the particles and the surrounding matrix. No significant relationship is found between cryogenic cycles and external dimensions. Moreover, the cryogenic cycle barely increases the macroscopic stress of the annealed sample. For composites with equal volume fraction of SiC particles, the reduction in the internal stress after multiple cryogenic cycles is the same regardless of the SiC size. Moreover, the effect of multiple cryogenic cycles on the reduction in internal stress has little to do with the cryogenic cycle temperature difference. Cryogenic cycles at temperatures ranges of 100~-196°C and 200~-196°C exhibit almost identical alterations in internal stress.