PREPARATION OF Ti-Ni HYDROGEN STORAGE FILMS BY ION BEAM SPUTTERING

Acta Metall Sin

1993, Vol. 29

Issue (1): 84-86 DOI:

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PREPARATION OF Ti-Ni HYDROGEN STORAGE FILMS BY ION BEAM SPUTTERING

ZHANG Yunshi;HU Weikang;WANG Da;YUAN Huatang;CHEN Youxiao Nankai University; Tianjin

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ZHANG Yunshi;HU Weikang;WANG Da;YUAN Huatang;CHEN Youxiao Nankai University; Tianjin. PREPARATION OF Ti-Ni HYDROGEN STORAGE FILMS BY ION BEAM SPUTTERING. Acta Metall Sin, 1993, 29(1): 84-86.

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Abstract

Ti-Ni alloy hydrogen storage films, but particularly amorphous one at roomtemperature, were prepared by ion beam sputtering method with a composite target of Ti andNi plate. The films have superior adhesion to substrate and anti-pulverizability. It was foundthat its hydrogen discharge capacity becomes higher after the amorphous film crystallized byannealing.

Key words: sputtering hydrogen storage Ti-Ni alloy film

Received: 18 January 1993

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https://www.ams.org.cn/EN/ OR https://www.ams.org.cn/EN/Y1993/V29/I1/84

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