SIZE EFFECTS ON DEFORMATION AND FRACTURE BEHAVIOR OF NANOSTRUCTURED METALLIC MULTILAYERS

doi:10.3724/SP.J.1037.2013.00599

Acta Metall Sin

2014, Vol. 50

Issue (2): 169-182 DOI: 10.3724/SP.J.1037.2013.00599

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SIZE EFFECTS ON DEFORMATION AND FRACTURE BEHAVIOR OF NANOSTRUCTURED METALLIC MULTILAYERS

ZHANG Jinyu(

), LIU Gang, SUN Jun

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049

Cite this article:

ZHANG Jinyu, LIU Gang, SUN Jun. SIZE EFFECTS ON DEFORMATION AND FRACTURE BEHAVIOR OF NANOSTRUCTURED METALLIC MULTILAYERS. Acta Metall Sin, 2014, 50(2): 169-182.

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Abstract

How to defeat the conflict of strength vs toughness and achieve unprecedented levels of damage tolerance within structural materials is a great challenge for designing microstructure-sensitive materials. The nanostructured metallic multilayers (NMMs) are widely used as essential components of high performance microelectronics and interconnect structures owing to their smart, tunable internal features and their outstanding mechanical properties. The deformation and fracture of NMMs during their service processes has been identified as an important factor influencing their reliability. The present authors had systematically investigated the size and interface effects on the mechanical properties, such as hardness/strength, tensile ductility, fracture toughness, deformation and fracture mechanisms of Cu/X (X=Cr, Nb, Zr) nanolayered films/micropillars, in addition to their microstructure evolution. In this paper, based on these experimental results achieved by the present authors, as well as the progresses at home and abroad made in the deformation and fracture behavior of NMMs, the correlation of microstructure-size constraint-mechanical performance in NMMs (and nanolayered micropillars) is reviewed, and the universities in their deformation and fracture modes and the related mechanisms are revealed. Finally, a brief prospect on the studies of NMMs in future in the light of manipulation of the internal features, origin and dynamics of dislocations and the high performance of NMMs at extreme is discussed.

Key words: nanostructured metallic multilayer plastic deformation fracture behavior size effect interface

Received: 22 September 2013

ZTFLH:

TG113

Fund: Supported by National Basic Research Program of China (No.2010CB631003), National Natural Science Foundation of China (Nos.51321003, 51322104 and 51201123), Program of Introducing Talents of Discipline to Universities of China (No.B06025) and China Postdoctoral Science Foundation (No.2012M521765)

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	Jinyu ZHANG
	Gang LIU
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https://www.ams.org.cn/EN/10.3724/SP.J.1037.2013.00599 OR https://www.ams.org.cn/EN/Y2014/V50/I2/169

Fig.1

不同晶体/晶体(fcc/bcc, fcc/fcc, fcc/hcp)与晶体/非晶体系中金属多层膜硬度H与单层厚度h的关系

Fig.2

晶体/晶体与晶体/非晶体系纳米多层膜微柱体最大强度σ_max与h和直径?的关系^{[27,59,69,71~74]}

Fig.3

调制比η=1.0的Cu/X多层膜延性对h及Cu, Cr薄膜延性对膜厚h_M的依赖性^[24,84]; Cu/Cr多层膜延性ε_C随η的变化规律^[23,84];断裂韧性K_IC和归一化断裂韧性K_IC与Cu层厚度h_Cu的关系曲线^[24,84,89]; Cu/Cr多层膜屈服强度σ_0.2与ε_C的线性关系^[24,84].

Fig.4

晶体/晶体多层膜微柱变形模式图^[71] (根据现有的实验结果将图分为3个区域: R_I为局部剪切变形区, R_II为剪切加挤出变形区, R_III为均匀挤出变形区)

Fig.5

Cu/Cu-Zr晶体/非晶多层膜微柱变形模式机制图^[69] (根据现有的实验结果将图分为2个区域: R_I为局部剪切变形区, R_II为均匀挤出变形区)

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