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反应磁控溅射 TiN/AlON纳米多层膜的微结构与显微硬度 |
黄碧龙 吴昕蔚 孔 明 李戈扬 |
(上海交通大学金属基复合材料国家重点实验室; 上海 200030) |
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Microstructures and Mechanical Properties of TiN/AlON Nanomultilayers synthesized by Reactive Magnetron Sputtering |
Bilong Li;;;Geyang Li |
上海交通大学 |
引用本文:
黄碧龙; 吴昕蔚; 孔明; 李戈扬 . 反应磁控溅射 TiN/AlON纳米多层膜的微结构与显微硬度[J]. 金属学报, 2008, 44(2): 193-197 .
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Microstructures and Mechanical Properties of TiN/AlON Nanomultilayers synthesized by Reactive Magnetron Sputtering[J]. Acta Metall Sin, 2008, 44(2): 193-197 .
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