Please wait a minute...
金属学报  2026, Vol. 62 Issue (6): 1069-1081    DOI: 10.11900/0412.1961.2025.00127
  研究论文 本期目录 | 过刊浏览 |
Mo表面硅化物-硼化物复合涂层的微观组织与高温氧化行为
吴洲1, 吴凡2, 王一茗1, 甘有良1, 付雪松1, 陈国清1, 周文龙1, 祖宇飞1()
1 大连理工大学 材料科学与工程学院 大连 116024
2 中国航空制造技术研究院 北京 100024
Microstructure and High-Temperature Oxidation Behavior of Silicide-Boride Composite Coatings on the Surface of Mo
WU Zhou1, WU Fan2, WANG Yiming1, GAN Youliang1, FU Xuesong1, CHEN Guoqing1, ZHOU Wenlong1, ZU Yufei1()
1 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
2 AVIC Manufacturing Technology Institute, Beijing 100024, China
引用本文:

吴洲, 吴凡, 王一茗, 甘有良, 付雪松, 陈国清, 周文龙, 祖宇飞. Mo表面硅化物-硼化物复合涂层的微观组织与高温氧化行为[J]. 金属学报, 2026, 62(6): 1069-1081.
Zhou WU, Fan WU, Yiming WANG, Youliang GAN, Xuesong FU, Guoqing CHEN, Wenlong ZHOU, Yufei ZU. Microstructure and High-Temperature Oxidation Behavior of Silicide-Boride Composite Coatings on the Surface of Mo[J]. Acta Metall Sin, 2026, 62(6): 1069-1081.

全文: PDF(3836 KB)   HTML
摘要: 

为改善Mo及其合金高温氧化易失效的问题,明确硅化物-硼化物复合涂层的梯度结构形成机制和性能变化规律,以进一步提升其高温抗氧化性能,本工作采用包埋渗法在纯Mo表面制备了硅化物涂层和硅化物-硼化物复合涂层,并研究了其微观组织演化和高温氧化行为。结果表明,B元素的引入使得硅化物-硼化物复合涂层具备MoSi2/(MoSi2 + MoB)/Mo5Si3/MoB/Mo2B五层梯度结构。B诱导基体表面率先形成MoB层,该层不仅阻碍了Si原子的定向扩散,同时触发Si与MoB的置换反应生成MoSi2,减弱了MoSi2的(001)择优生长趋势。此外,MoSi2 + MoB混合层内MoB相形成伴随的体积收缩导致的孔洞和粗糙界面,可提供高密度形核位点,从而显著细化表面MoSi2晶粒。细化晶粒加速了致密、连续SiO2保护膜的形成,有效阻挡O扩散。在1200 ℃氧化30 h后,氧化增重仅为1.28 mg/cm2,氧化速率常数为0.29 mg/(cm2·h),较硅化物涂层降低53%。同时由于MoB层的存在,有效减缓了Si元素向基体内的扩散,显著提升了涂层在长期高温氧化环境下的稳定性。

关键词 硅化物-硼化物复合涂层包埋渗高温氧化Mo    
Abstract

Mo and its alloys exhibit considerable potential for aerospace high-temperature components, electronic thermal management systems, and high-temperature power-generation structures due to their high melting point, excellent elevated-temperature mechanical strength, and good creep resistance. However, their application is severely limited by rapid oxidation at temperatures above 700 oC, where the formation and volatilization of MoO3 lead to accelerated material loss and structural degradation. This oxidation susceptibility can ultimately result in disintegration and catastrophic failure under extreme service conditions. The application of silicide-based coatings is an effective strategy to mitigate high-temperature oxidation by forming a protective barrier that isolates the substrate from the environment. Nevertheless, monolithic silicide coatings often suffer from premature failure caused by thermal expansion mismatch with the substrate and inward silicon diffusion during prolonged high-temperature exposure. In this context, silicide-boride composite coatings have emerged as a promising alternative for further improving oxidation resistance. Despite their potential, the mechanisms governing gradient microstructure formation and the origins of performance variability in such composite coatings remain insufficiently understood. In this study, silicide and silicide-boride composite coatings were fabricated on pure Mo substrates using halide-activated pack cementation, and their microstructural evolution and high-temperature oxidation behavior were systematically investigated. The results demonstrate that B element incorporation promotes the formation of a silicide-boride composite coating with a five-layer graded structure: MoSi2/(MoSi2 + MoB)/Mo5Si3/MoB/Mo2B. Notably, B facilitates the preferential formation of an initial MoB interlayer at the coating-substrate interface. This interlayer not only inhibits the directional diffusion of Si but also induces a displacement reaction between Si and MoB to form MoSi2, thereby suppressing the (001) preferred growth orientation of MoSi2. In addition, volume contraction associated with MoB formation within the MoSi2 + MoB mixed layer generates pores and a roughened interface, which act as high-density nucleation sites and significantly refine the surface MoSi2 grain structure. The refined grain structure accelerated the formation of a dense and continuous SiO2 protective film, thereby effectively inhibiting O diffusion. After 30 h of oxidation at 1200 oC, the silicide-boride composite coating exhibited an oxidation mass gain of 1.28 mg/cm2 and an oxidation rate constant of 0.29 mg/(cm2·h), representing a 53% reduction relative to the silicide coating. Moreover, the MoB interlayer suppressed inward Si diffusion into the substrate, thereby enhancing long-term stability under high-temperature oxidative conditions.

Key wordssilicide-boride composite coating    halide-activated pack cementation    high-temperature oxidation    Mo
收稿日期: 2025-05-08     
ZTFLH:  TG174.4  
基金资助:国家自然科学基金项目(51805069)
通讯作者: 祖宇飞,yfzu@dlut.edu.cn,主要从事高温结构材料研究
Corresponding author: ZU Yufei, associate professor, Tel: 13704112760, E-mail: yfzu@dlut.edu.cn
作者简介: 吴 洲,男,1999年生,博士生
图1  硅化物涂层及硅化物-硼化物复合涂层表面的XRD谱
图2  硅化物涂层和硅化物-硼化物复合涂层表面形貌的SEM像和EDS分析
图3  硅化物涂层和硅化物-硼化物复合涂层截面形貌的SEM像
CoatingLayerSpotAtomic fraction / %Possible phase
BSiMo
Silicide coatingLayer I1-65.8034.20MoSi2
Layer II2-37.6462.36Mo5Si3
Silicide-boride composite coatingLayer I3-64.2135.79MoSi2
Layer II451.440.5548.01MoB
5-67.0532.95MoSi2
Layer III60.7636.3862.86Mo5Si3
Layer IV759.25-40.75MoB
Layer V830.95-69.05Mo2B
表1  图3中点1~8的EDS成分分析结果
图4  硅化物涂层和硅化物-硼化物复合涂层截面的EBSD分析
图5  硅化物涂层和硅化物-硼化物复合涂层截面中不同物相的极图
图6  不同保温时间下硅化物-硼化物复合涂层表面的XRD谱
图7  不同保温时间下硅化物-硼化物复合涂层截面形貌的SEM像
图8  1200 ℃下硅化物-硼化物复合涂层的生长动力学曲线
图9  不同温度下30Si-5NaCl-65Al2O3和30Si-1B-5NaCl-64Al2O3渗剂粉末内主要气相的平衡分压
图10  纯Mo表面硅化物涂层和硅化物-硼化物复合涂层的形成机理示意图
图11  硅化物涂层及硅化物-硼化物复合涂层在1200 ℃的氧化动力学曲线
图12  硅化物涂层和硅化物-硼化物复合涂层在1200 ℃氧化1和30 h后的XRD谱
图13  硅化物涂层和硅化物-硼化物复合涂层在1200 ℃氧化1和30 h后表面形貌的SEM像
SpotAtomic fraction / %Possible phase
OAlSiMo
13.12-62.7334.15MoSi2
267.720.6030.770.91SiO2
354.685.7339.59-SiO2, Al2O3
43.42-63.1333.45MoSi2
547.439.6033.249.73SiO2, Al2O3, MO3
655.486.1736.851.50SiO2, Al2O3
750.6013.6220.5215.26SiO2, Al2O3, MO3
843.3910.7735.6610.18SiO2, Al2O3, MO3
954.9610.1434.90-SiO2, Al2O3
表2  图13中点1~9的EDS成分分析结果
图14  硅化物涂层和硅化物-硼化物复合涂层在1200 ℃氧化1 h后截面形貌的SEM像
SpotAtomic fraction / %Possible
BOSiMophase
1-4.5034.5960.91Mo5Si3
2-4.9034.3260.78Mo5Si3
3--35.7364.27Mo5Si3
4--34.4365.57Mo5Si3
550.11-0.2949.60MoB
638.27-0.3161.42Mo2B
表3  图14中点1~6点的EDS成分分析结果
图15  硅化物涂层和硅化物-硼化物复合涂层在1200 ℃氧化30 h后截面形貌的SEM像
SpotAtomic fraction / %Possible phase
OAlSiMo
126.087.5666.36-SiO2, Al2O3
23.98-34.0961.93Mo5Si3
32.20-64.8033.00MoSi2
457.585.8134.761.85SiO2, Al2O3
55.92-34.5259.56Mo5Si3
62.25-64.7433.01MoSi2
表4  图15中点1~6的EDS成分分析结果
[1] Ding H Y, Yin Y J, Guan J R, et al. Research progress on additively manufactured refractory metals[J]. Rare Met. Mater. Eng., 2021, 50: 2237
[1] 丁红瑜, 尹衍军, 关杰仁 等. 难熔金属增材制造研究进展[J]. 稀有金属材料与工程, 2021, 50: 2237
[2] Kamata S Y, Kanekon D, Lu Y Y, et al. Ultrahigh-temperature tensile creep of TiC-reinforced Mo-Si-B-based alloy[J]. Sci. Rep., 2018, 8: 10487
doi: 10.1038/s41598-018-28379-w pmid: 29992968
[3] Depka T, Somsen C, Eggeler G, et al. Microstructures of Co-Re-Cr, Mo-Si and Mo-Si-B high-temperature alloys[J]. Mater. Sci. Eng., 2009, A510-511: 337
[4] Cai Z Y, Zhao X J, Zhang D X, et al. Microstructure and oxidation resistance of a YSZ modified silicide coating for Ta-W alloy at 1800 oC[J]. Corros. Sci., 2018, 143: 116
doi: 10.1016/j.corsci.2018.08.007
[5] Yu L H, Shen F Q, Fu T, et al. Microstructure and oxidation behavior of metal-modified Mo-Si-B alloys: A review[J]. Coatings, 2021, 11: 1256
doi: 10.3390/coatings11101256
[6] Ding Z Y, Brouwer J C, Kwakernaak C, et al. Selective oxidation of aluminium in Mo(Al, Si)2[J]. Corros. Sci., 2023, 211: 110884
doi: 10.1016/j.corsci.2022.110884
[7] Lemberg J A, Ritchie R O. Mo-Si-B alloys for ultrahigh-temperature structural applications[J]. Adv. Mater., 2012, 24: 3445
doi: 10.1002/adma.v24.26
[8] An L, Gao C Q, Jia J G, et al. Review on metal silicide anti-oxidation coatings[J]. J. Chin. Soc. Corros. Prot., 2021, 41: 298
[8] 安 亮, 高昌琦, 贾建刚 等. 金属硅化物抗氧化涂层的研究进展[J]. 中国腐蚀与防护学报, 2021, 41: 298
[9] Yi Z Q, Tan D Q, Tang Y, et al. Characterization of microstructure and oxidation resistance of Y modified silicide composite coating on Mo-Cr-W-Al-Ti substrate[J]. Ceram. Int., 2022, 48: 9848
doi: 10.1016/j.ceramint.2021.12.187
[10] Zhang Y Y, Cui K K, Fu T, et al. Synthesis WSi2 coating on W substrate by HDS method with various deposition times[J]. Appl. Surf. Sci., 2020, 511: 145551
doi: 10.1016/j.apsusc.2020.145551
[11] Yan J H, Lin Y Z, Wang Y, et al. Refractory WMoNbVTa high-entropy alloy as a diffusion barrier between a molybdenum substrate and MoSi2 ceramic coating[J]. Ceram. Int., 2022, 48: 11410
doi: 10.1016/j.ceramint.2021.12.364
[12] Xiao L R, Zhou X J, Wang Y F, et al. Formation and oxidation behavior of Ce-modified MoSi2-NbSi2 coating on niobium alloy[J]. Corros. Sci., 2020, 173: 108751
doi: 10.1016/j.corsci.2020.108751
[13] Fu T, Shen F Q, Zhang Y Y, et al. Oxidation protection of high-temperature coatings on the surface of Mo-based alloys—A review[J]. Coatings, 2022, 12: 141
doi: 10.3390/coatings12020141
[14] Szajna E, Moskal G, Stryczniewicz W, et al. Microstructure and high-temperature oxidation behaviour of MoSi2 protective coatings on Mo-based combustion chamber in rocket engines[J]. Surf. Coat. Technol., 2023, 473: 129896
doi: 10.1016/j.surfcoat.2023.129896
[15] Wang K, Reeber R R. The role of defects on thermophysical properties: Thermal expansion of V, Nb, Ta, Mo and W[J]. Mater. Sci. Eng., 1998, R23: 101
[16] Engström I, Lönnberg B. Thermal expansion studies of the group IV-VII transition-metal disilicides[J]. J. Appl. Phys., 1988, 63: 4476
doi: 10.1063/1.340168
[17] Xiao L R, Zhang B, Cai Z Y, et al. Thermal shock behavior and crack propagation of MoSi2 coating on molybdenum alloy[J]. Rare Met. Mater. Eng., 2018, 47: 3387
[17] 肖来荣, 张 贝, 蔡圳阳 等. 钼合金MoSi2涂层高温热震行为与裂纹扩展[J]. 稀有金属材料与工程, 2018, 47: 3387
[18] Yoon J K, Kim G H. Isothermal and cyclic oxidation behavior of in-situ grown MoSi2-SiC coating on Mo substrate at 1300 oC[J]. Surf. Coat. Technol., 2023, 464: 129582
doi: 10.1016/j.surfcoat.2023.129582
[19] Zhang Y F, Xiao L R, Zeng D L, et al. A novel niobium based oxidation protective coating with three lines of defense at ultra-high temperature[J]. Corros. Sci., 2022, 206: 110515
doi: 10.1016/j.corsci.2022.110515
[20] Zhang Y F, Liu S N, Zhou X J, et al. Ultra-high temperature oxidation behavior of ZrB2/YSZ modified Si-Mo-W coating with a diffusion barrier on niobium alloy[J]. Corros. Sci., 2022, 195: 109977
doi: 10.1016/j.corsci.2021.109977
[21] Wang Y, Wang D Z, Yan J H. Preparation and characterization of MoSi2/MoB composite coating on Mo substrate[J]. J. Alloys Compd., 2014, 589: 384
doi: 10.1016/j.jallcom.2013.12.023
[22] Chen Z, Yu W P, Wen S H, et al. First principles study on effect of B addition on oxidation resistance of MoSi2-based compound[J]. J. Chin. Soc. Corros. Prot., 2025, 45: 224
[22] 陈 郑, 宇文佩, 温思涵 等. B添加对MoSi2基化合物抗氧化性能影响的第一性原理研究[J]. 中国腐蚀与防护学报, 2025, 45: 224
[23] Zhao H L, Kramer M J, Akinc M. Thermal expansion behavior of intermetallic compounds in the Mo-Si-B system[J]. Intermetallics, 2004, 12: 493
doi: 10.1016/j.intermet.2004.01.005
[24] Shan X, Cai H Y, Luo L R, et al. Influence of pore characteristics of air plasma sprayed thermal barrier coatings on calcia-magnesia-alumino-silicate (CMAS) attack behavior[J]. Corros. Sci., 2021, 190: 109636
doi: 10.1016/j.corsci.2021.109636
[25] Scrivani A, Rizzi G, Berndt C C. Enhanced thick thermal barrier coatings that exhibit varying porosity[J]. Mater. Sci. Eng., 2008, A476: 1
[26] Cockeram B, Rapp R A. Development and growth of boron-modified and germanium-doped titanium-silicide diffusion coatings by the halide-activated, pack-cementation method[J]. Oxid. Met., 1996, 45: 375
doi: 10.1007/BF01046990
[27] Cai Z Y, Liu S N, Xiao L R, et al. Oxidation behavior and microstructural evolution of a slurry sintered Si-Mo coating on Mo alloy at 1650 oC[J]. Surf. Coat. Technol., 2017, 324: 182
doi: 10.1016/j.surfcoat.2017.05.054
[28] Spear K E, Liao P K. The B-Mo (boron-molybdenum) system[J]. Bull. Alloy Phase Diagr., 1988, 9: 457
doi: 10.1007/BF02881867
[29] Yang Y, Chang Y A. Thermodynamic modeling of the Mo-Si-B system[J]. Intermetallics, 2005, 13: 121
doi: 10.1016/j.intermet.2004.06.007
[30] Tang Z H, Thom A J, Kramer M J, et al. Characterization and oxidation behavior of silicide coating on multiphase Mo-Si-B alloy[J]. Intermetallics, 2008, 16: 1125
doi: 10.1016/j.intermet.2008.06.014
[31] Hayashi T, Ito K, Numakura H. Reaction diffusion of MoSi2 and Mo5SiB2[J]. Intermetallics, 2005, 13: 93
doi: 10.1016/j.intermet.2004.06.005
[32] Yoon J K, Doh J M, Byun J Y, et al. Formation of MoSi2-SiC composite coatings by chemical vapor deposition of Si on the surface of Mo2C layer formed by carburizing of Mo substrate[J]. Surf. Coat. Technol., 2003, 173: 39
doi: 10.1016/S0257-8972(03)00465-1
[33] Grosfils P, Lutsko J F. Impact of surface roughness on crystal nucleation[J]. Crystals, 2020, 11: 4
doi: 10.3390/cryst11010004
[34] Zhang G J, Kou H, Dang Q, et al. Microstructure and oxidation resistance behavior of lanthanum oxide-doped Mo-12Si-8.5B alloys[J]. Int. J. Refract. Met. Hard Mater., 2012, 30: 6
doi: 10.1016/j.ijrmhm.2011.06.003
[35] Rioult F A, Imhoff S D, Sakidja R, et al. Transient oxidation of Mo-Si-B alloys: Effect of the microstructure size scale[J]. Acta Mater., 2009, 57: 4600
doi: 10.1016/j.actamat.2009.06.036
[36] Zhang Y F, Zhou X J, Cheng H C, et al. Fabrication and oxidation resistance of a novel MoSi2-ZrB2-based coating on Mo-based alloy[J]. Materials, 2023, 16: 5634
doi: 10.3390/ma16165634
[37] Rodríguez-Viejo J, Sibieude F, Clavaguera-Mora M T, et al. 18O diffusion through amorphous SiO2 and cristobalite[J]. Appl. Phys. Lett., 1993, 63: 1906
doi: 10.1063/1.110644
[38] Chatilyan H A, Kharatyan S L, Harutyunyan A B. Diffusion annealing of Mo/MoSi2 couple and silicon diffusivity in Mo5Si3 layer[J]. Mater. Sci. Eng., 2007, A459: 227
[1] 郑玉峰, 谌雨农. Mo及钼基可降解金属材料的研究现状与发展趋势[J]. 金属学报, 2026, 62(5): 905-922.
[2] 郭世佳, 李健乐, 袁圣云, 李志刚, 于连旭, 张勇. 一种含稀土新型第四代镍基单晶高温合金的高温氧化行为和 γ' 相稳定性[J]. 金属学报, 2026, 62(2): 351-362.
[3] 毕健浩男, 张艳, 王振玉, 周晟昊, 刘永跃, 张小岩, 汪爱英. Mo含量对CrAlMoN涂层微观结构、力学性能及摩擦学性能的影响[J]. 金属学报, 2025, 61(9): 1413-1424.
[4] 李永梅, 谭子昊, 王新广, 陶稀鹏, 杨彦红, 刘纪德, 刘金来, 李金国, 周亦胄, 孙晓峰. 一种低成本第三代单晶高温合金的高温氧化行为[J]. 金属学报, 2025, 61(7): 1049-1059.
[5] 杨明辉, 李星吾, 孙崇昊, 阮莹. 定向凝固与固态相变双联协控下Monel K-500合金的组织和力学性能[J]. 金属学报, 2025, 61(4): 561-571.
[6] 宋昱杉, 刘叡, 崔宇, 刘莉, 王福会. 静水压力和拉伸应力交互作用下Ni-Cr-Mo-V钢在3.5%NaCl溶液中的应力腐蚀行为[J]. 金属学报, 2025, 61(2): 309-322.
[7] 俞强, 徐诗彤, 张佳楠, 姚美意, 胡丽娟, 谢耀平, 周邦新. Zr-0.75Sn-0.35Fe-0.15Cr-xNb合金在高温空气/蒸汽混合气氛中的氧化行为[J]. 金属学报, 2025, 61(11): 1689-1702.
[8] 吕云蕾, 任延杰, 冯抗抗, 周梦妮, 王文, 陈荐, 牛焱. 四元Co-Ni-Cr-Al合金高温氧化模式及其转变机理[J]. 金属学报, 2024, 60(7): 947-956.
[9] 刘丞济, 孙文瑶, 陈明辉, 王福会. 放电等离子烧结Ni20Cr-xAl合金的高温氧化行为[J]. 金属学报, 2024, 60(4): 485-494.
[10] 蔡杰, 高杰, 花银群, 叶云霞, 关庆丰, 张小锋. 强流脉冲电子束辐照对低压等离子喷涂 MCrAlY涂层组织与性能的影响[J]. 金属学报, 2024, 60(4): 495-508.
[11] 梁恩溥, 徐乐, 王毛球, 时捷. NiAlCu40CrNi3MoV钢中的析出行为及其对力学性能的影响[J]. 金属学报, 2024, 60(2): 201-210.
[12] 杨彬彬, 宋元元, 郝龙, 姜海昌, 戎利建. 3%Cu低碳马氏体不锈钢0Cr13Ni4Mo的显微组织及耐腐蚀性能[J]. 金属学报, 2024, 60(12): 1656-1666.
[13] 沈朝, 王志鹏, 胡波, 李德江, 曾小勤, 丁文江. 镁合金抗高温氧化机理研究进展[J]. 金属学报, 2023, 59(3): 371-386.
[14] 徐文国, 郝文江, 李应举, 赵庆彬, 卢炳聿, 郭和一, 刘天宇, 冯小辉, 杨院生. 微量AlTiInconel 690合金高温氧化行为的影响[J]. 金属学报, 2023, 59(12): 1547-1558.
[15] 陈继林, 冯光宏, 马洪磊, 杨栋, 刘维. Cr-Mo微合金冷镦钢的显微组织、力学性能及强化机制[J]. 金属学报, 2022, 58(9): 1189-1198.