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Acta Metall Sin  2017, Vol. 53 Issue (5): 592-600    DOI: 10.11900/0412.1961.2016.00499
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Liquid-Solid Electromigration Behavior of Cu/Sn-52In/Cu Micro-Interconnect
Zhijie ZHANG1,Mingliang HUANG2()
1 School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003, China
2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
Cite this article: 

Zhijie ZHANG,Mingliang HUANG. Liquid-Solid Electromigration Behavior of Cu/Sn-52In/Cu Micro-Interconnect. Acta Metall Sin, 2017, 53(5): 592-600.

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Abstract  

Electromigration (EM), which describes the mass transport due to the momentum exchange between conducting electrons and diffusing metal atoms under an applied electric field, has become a serious reliability issue in high-density packaging. With the increasing demands for miniaturization, liquid-solid (L-S) EM will pose a critical challenge to the reliability of solder interconnects. In this work, The interfacial reactions and diffusion behaviors of In, Sn and Cu atoms in Cu/Sn-52In/Cu interconnects during L-S EM under a current density of 2.0×104 A/cm2 at 120 and 180 ℃ have been in situ studied by using synchrotron radiation real-time imaging technology. During L-S EM, since there was no back-stress, the In atoms directionally migrated toward the anode due to the negative effective charge number (Z*) of In, which is different from the In atoms directionally migrated toward the cathode due to the back-stress induced by the preferential migration of the Sn atoms over the In atoms toward the anode during the solid-solid (S-S) EM. Furthermore, a modified expression for calculating the effective charge number Z* of liquid metals was proposed based on the enthalpy changes of melting process. The Z* of In atoms was calculated to be -2.30 and -1.14 at 120 and 180 ℃, respectively, which was consistent with the migration behavior of In atoms. The model provides a theoretical basis for determining the direction of the EM. The polarity effect, evidenced by the IMC layer at the anode growing continuously while that at the cathode was restrained, was resulted from the directional migration of In and Cu atoms toward the anode during L-S EM, which was more significant at high temperature. The consumption of cathode Cu during L-S EM followed a parabolic relationship with the EM time, and the consumption rate was magnitude higher at high temperature. The migrations of In atoms was discussed in terms of diffusion flux.

Key words:  electromigration      Sn-52In micro-interconnect      effective charge number      interfacial reaction      intermetallic compound     
Received:  10 November 2016     
Fund: Supported by National Natural Science Foundation of China (Nos.51475072 and 51671046)

URL: 

https://www.ams.org.cn/EN/10.11900/0412.1961.2016.00499     OR     https://www.ams.org.cn/EN/Y2017/V53/I5/592

Fig.1  Schematic of the line-type Cu/Sn-52In/Cu solder interconnect
Fig.2  SEM images of as-soldered Cu/Sn-52In/Cu interconnect(a) macrograph(b) Cu/Sn-52In interface(c) Sn-52In/Cu interface
Fig.3  Synchrotron radiation images of the Cu/Sn-52In/Cu interconnect during L-S EM under 2.0×104 A/cm2 at 120 ℃ for 0 min (a), 10 min (b), 20 min (c), 30 min (d), 40 min (e), 50 min (f), 60 min (g) and solidification (h) (L-S EM—liquid-solid electromigration, IMCs—intermetallic compouds)
Fig.4  SEM images of the Cu/Sn-52In/Cu interconnects after L-S EM under 2.0×104 A/cm2 at 120 ℃ for 1 h(a) whole interconnect(b) anode interface(c) cathode interface
Fig.5  Synchrotron radiation images of the Cu/Sn-52In/Cu interconnect during L-S EM under 2.0×104 A/cm2 at 180 ℃ for 0 min (a), 10 min (b), 20 min (c), 30 min (d), 40 min (e), 50 min (f), 60 min (g) and solidification (h)
Fig.6  SEM images of the Cu/Sn-52In/Cu interconnects after L-S EM under 2.0×104 A/cm2 at 180 ℃ for 1 h(a) whole interconnect(b) anode interface(c) cathode interface
Fig.7  Consumption kinetics of the cathode Cu in Cu/Sn-52In/Cu interconnects as a function of EM time under 2.0×104 A/cm2 at 120 and 180 ℃
Fig.8  Schematics of the In atomic fluxes in Cu/Sn-52In/Cu interconnects during L-S EM (JchemInand JemIn are the In atomic fluxes induced by chemical potential gradient and EM, respectively)
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