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| INFLUENCE OF C CONTENT ON STRUCTURE AND MECHANICAL PROPERTIES OF ZrCN COMPOSITE FILMS |
| YU Lihua, MA Bingyang, XU Junhua |
| School of Material Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003 |
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Cite this article:
YU Lihua, MA Bingyang, XU Junhua. INFLUENCE OF C CONTENT ON STRUCTURE AND MECHANICAL PROPERTIES OF ZrCN COMPOSITE FILMS. Acta Metall Sin, 2012, 48(4): 469-474.
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Abstract ZrCN thin films with different C contents were deposited by reactive unbalanced magnetron sputtering. Their chemical composition, microstructure, surface morphology, mechanical and tribological properties were investigated by XPS, XRD, SEM, AFM, nanoindentation and tribometer. The results indicated that the atomic ratios of (C+N)/Zr played an important role in phase configuration, microstructure, mechanical and tribological properties. When the ratio was less than 1, a Zr(C, N) solid solution was formed due to the dissolution of C into the ZrN lattice. When the ratio was larger than 1, the amorphous phase CN and C appeared and the ZrCN thin films had a fcc crystal structure. As the C contents increased, the diffraction peak decreased and widen, and the hardness of ZrCN thin films increased first and then decreased. As the C contents increased, the coefficient of friction of ZrCN thin films decreased and the wear scar became more shallower and narrower. The incorporation of C changed the wear mode and improved the friction and wear behaviors. The hardness of ZrCN film reached 31 GPa and friction coefficient was 0.26 when C content was 13.2%.
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Received: 15 November 2011
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| Fund: National Natural Science Foundation of China |
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