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Acta Metall Sin  1993, Vol. 29 Issue (4): 81-84    DOI:
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EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION
YANG Dejun;ZHOU Honghui;LI Huiqin University of Science and Technology Beijing professor;Department of Corrosion Engineering; University of Science and Technology Beijing; Beijing 100083
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YANG Dejun;ZHOU Honghui;LI Huiqin University of Science and Technology Beijing professor;Department of Corrosion Engineering; University of Science and Technology Beijing; Beijing 100083. EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION. Acta Metall Sin, 1993, 29(4): 81-84.

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Abstract  Effect of increasing content of Ti on the crystalline to amorphous transition inalloy films of stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposi-tion is reported. X-ray diffraction analysis revealed that the microstructure of film issequently changed from α-Fe, α-Fe+x-phase, microcrystalline-amorphous into amorphouswith increasing content of Ti from 0-3, 3-10, 10-18 to 18-30wt-% respectively.
Key words:  magnetron sputtering      stainless steel film      Ti      microstructure     
Received:  18 April 1993     
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